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1009 Exhibit: TSMC 1009 Chiang USP 6398929 TSMC

Document IPR2014-00844, No. 1009 Exhibit - TSMC 1009 Chiang USP 6398929 TSMC (P.T.A.B. May. 29, 2014)

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1110 Exhibit: The Materials Science of Thin Films

Document IPR2014-01069, No. 1110 Exhibit - The Materials Science of Thin Films (P.T.A.B. Jun. 30, 2014)

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1104 Exhibit: US Patent No 6,413,382

Document IPR2014-01069, No. 1104 Exhibit - US Patent No 6,413,382 (P.T.A.B. Jun. 30, 2014)

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1013 Exhibit: Applicant Amendment and Response re Serial No 11183463

Document IPR2014-01037, No. 1013 Exhibit - Applicant Amendment and Response re Serial No 11183463 (P.T.A.B. Jun. 30, 2014)

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1007 Exhibit: US Patent No 7,147,759

Document IPR2014-01037, No. 1007 Exhibit - US Patent No 7,147,759 (P.T.A.B. Jun. 30, 2014)

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1202 Exhibit: Declaration of Kortshagen

Document IPR2014-00470, No. 1202 Exhibit - Declaration of Kortshagen (P.T.A.B. Mar. 7, 2014)

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1119 Exhibit: Exhibit C12

Document IPR2014-01069, No. 1119 Exhibit - Exhibit C12 (P.T.A.B. Jun. 30, 2014)

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1102 Exhibit: Kortshagen Declaration

Document IPR2014-01069, No. 1102 Exhibit - Kortshagen Declaration (P.T.A.B. Jun. 30, 2014)

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1008 Exhibit: Plasma Etching

Document IPR2014-01037, No. 1008 Exhibit - Plasma Etching (P.T.A.B. Jun. 30, 2014)

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1210 Exhibit: WO02 103078 Kouznetsov

Document IPR2014-00470, No. 1210 Exhibit - WO02 103078 Kouznetsov (P.T.A.B. Mar. 7, 2014)

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1109 Exhibit: US Patent No 5,958,155

Document IPR2014-01069, No. 1109 Exhibit - US Patent No 5,958,155 (P.T.A.B. Jun. 30, 2014)

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1216 Exhibit: Response 06 23 2010

Document IPR2014-00470, No. 1216 Exhibit - Response 06 23 2010 (P.T.A.B. Mar. 7, 2014)

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1122 Exhibit: Exhibit C13

Document IPR2014-01069, No. 1122 Exhibit - Exhibit C13 (P.T.A.B. Jun. 30, 2014)

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1010 Exhibit: TSMC 1010 Ohring, The Materials Science of Thin Films

Document IPR2014-00844, No. 1010 Exhibit - TSMC 1010 Ohring, The Materials Science of Thin Films (P.T.A.B. May. 29, 2014)

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1222 Exhibit: Claim Chart Mozgrin, Lantsman, and Kudryavtsev

Document IPR2014-00470, No. 1222 Exhibit - Claim Chart Mozgrin, Lantsman, and Kudryavtsev (P.T.A.B. Mar. 7, 2014)

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