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1413 Exhibit: File History for US Pat No 7,147,759,Response of May 2, 2006

Document IPR2014-01083, No. 1413 Exhibit - File History for US Pat No 7,147,759,Response of May 2, 2006 (P.T.A.B. Jun. 30, 2014)

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1223 Exhibit: Fu US Patent 6303265

Document IPR2014-00445, No. 1223 Exhibit - Fu US Patent 6303265 (P.T.A.B. Feb. 20, 2014)

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1204 Exhibit: Kudryavtsev 1983

Document IPR2014-00445, No. 1204 Exhibit - Kudryavtsev 1983 (P.T.A.B. Feb. 20, 2014)

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1229 Exhibit: Claim Chart Mozgrin Kudryavtsev and Muller Horsche

Document IPR2014-00445, No. 1229 Exhibit - Claim Chart Mozgrin Kudryavtsev and Muller Horsche (P.T.A.B. Feb. 20, 2014)

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1425 Exhibit: Ex 1425 Depo Transcript of Larry D Hartsough PhD for US 7,808,184...

Document IPR2014-01083, No. 1425 Exhibit - Ex 1425 Depo Transcript of Larry D Hartsough PhD for US 7,808,184 IPRs 00803, 00799 dated February 11, 2015 (P.T.A.B. May. 4, 2015)

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1406 Exhibit: Plasma Etching An Introduction, by Manos and Flamm, pp 185 258, A...

Document IPR2014-01083, No. 1406 Exhibit - Plasma Etching An Introduction, by Manos and Flamm, pp 185 258, Academic Press 1989 (P.T.A.B. Jun. 30, 2014)

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1219 Exhibit: Mozgrin Catalogue Entry

Document IPR2014-00445, No. 1219 Exhibit - Mozgrin Catalogue Entry (P.T.A.B. Feb. 20, 2014)

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3002 Exhibit: Exhibit 3002

Document IPR2014-01083, No. 3002 Exhibit - Exhibit 3002 (P.T.A.B. May. 29, 2015)

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1424 Exhibit: Ex 1424 Depo Transcript of Larry D Hartsough PhD for US 7,147,759...

Document IPR2014-01083, No. 1424 Exhibit - Ex 1424 Depo Transcript of Larry D Hartsough PhD for US 7,147,759 IPRs 00781, 00782, 01083, 01086, 01087 dated February 25, 2015 (P.T.A.B. May. 4, 20...

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1404 Exhibit: A A Kudryavtsev and VN Skerbov, Ionization relaxation in a plasma p...

Document IPR2014-01083, No. 1404 Exhibit - A A Kudryavtsev and VN Skerbov, Ionization relaxation in a plasma produced by a pulsed inert gas discharge, Sov Phys Tech Phys 281, pp 30 35, January 19...

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1212 Exhibit: Office Action 01 11 2006

Document IPR2014-00445, No. 1212 Exhibit - Office Action 01 11 2006 (P.T.A.B. Feb. 20, 2014)

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1102 Exhibit: Kortshagen Declaration

Document IPR2014-00984, No. 1102 Exhibit - Kortshagen Declaration (P.T.A.B. Jun. 19, 2014)

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1103 Exhibit: Mozgrin 1995

Document IPR2014-00984, No. 1103 Exhibit - Mozgrin 1995 (P.T.A.B. Jun. 19, 2014)

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1113 Exhibit: Response of May 2, 2006

Document IPR2014-00984, No. 1113 Exhibit - Response of May 2, 2006 (P.T.A.B. Jun. 19, 2014)

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1119 Exhibit: Claim Chart based on Wang, Kudryavtsev and Mozgrin

Document IPR2014-00984, No. 1119 Exhibit - Claim Chart based on Wang, Kudryavtsev and Mozgrin (P.T.A.B. Jun. 19, 2014)

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