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1111 Exhibit: 1111 Chistyakov USP 7147759

Document IPR2014-00863, No. 1111 Exhibit - 1111 Chistyakov USP 7147759 (P.T.A.B. May. 30, 2014)

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1203 Exhibit: Mozgrin 1995

Document IPR2014-01014, No. 1203 Exhibit - Mozgrin 1995 (P.T.A.B. Jun. 23, 2014)

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1114 Exhibit: Ohring 1992

Document IPR2014-01013, No. 1114 Exhibit - Ohring 1992 (P.T.A.B. Jun. 23, 2014)

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1104 Exhibit: US Patent No 6,190,512 Lantsman

Document IPR2014-01013, No. 1104 Exhibit - US Patent No 6,190,512 Lantsman (P.T.A.B. Jun. 23, 2014)

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1012 Exhibit: 1012 Ohring, The Materials Science of Thin Films

Document IPR2014-00866, No. 1012 Exhibit - 1012 Ohring, The Materials Science of Thin Films (P.T.A.B. May. 30, 2014)

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1115 Exhibit: Smith

Document IPR2014-00495, No. 1115 Exhibit - Smith (P.T.A.B. Mar. 13, 2014)

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1104 Exhibit: US Patent 6190512 Lantsman

Document IPR2014-00495, No. 1104 Exhibit - US Patent 6190512 Lantsman (P.T.A.B. Mar. 13, 2014)

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1114 Exhibit: 1114 Ohring, The Materials Science of Thin Films

Document IPR2014-00863, No. 1114 Exhibit - 1114 Ohring, The Materials Science of Thin Films (P.T.A.B. May. 30, 2014)

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1113 Exhibit: Manos

Document IPR2014-00495, No. 1113 Exhibit - Manos (P.T.A.B. Mar. 13, 2014)

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1419 Exhibit: Claim Chart Wang Lantsman

Document IPR2014-00498, No. 1419 Exhibit - Claim Chart Wang Lantsman (P.T.A.B. Mar. 13, 2014)

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1124 Exhibit: Claim Chart Based on Wang, Lantsman and Kudryavtsev

Document IPR2014-01013, No. 1124 Exhibit - Claim Chart Based on Wang, Lantsman and Kudryavtsev (P.T.A.B. Jun. 23, 2014)

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1109 Exhibit: Notice of Allowability 03 29 2004

Document IPR2014-01057, No. 1109 Exhibit - Notice of Allowability 03 29 2004 (P.T.A.B. Jun. 27, 2014)

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1113 Exhibit: 1113 Manos, Plasma Etching

Document IPR2014-00863, No. 1113 Exhibit - 1113 Manos, Plasma Etching (P.T.A.B. May. 30, 2014)

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1201 Exhibit: US Patent No 6,853,142

Document IPR2014-01014, No. 1201 Exhibit - US Patent No 6,853,142 (P.T.A.B. Jun. 23, 2014)

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1411 Exhibit: Response and RCE 05 02 2006

Document IPR2014-00498, No. 1411 Exhibit - Response and RCE 05 02 2006 (P.T.A.B. Mar. 13, 2014)

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