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1015 Exhibit: Cecchi Declaration

Document IPR2015-01764, No. 1015-5 Exhibit - Cecchi Declaration (P.T.A.B. Jul. 28, 2016)

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2005 Exhibit: PTAB Decision IPR 01759

Document IPR2015-01764, No. 2005 Exhibit - PTAB Decision IPR 01759 (P.T.A.B. May. 16, 2016)

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1013 Exhibit: Ex 1013 Chu PHV Declaration

Document IPR2015-01764, No. 1013 Exhibit - Ex 1013 Chu PHV Declaration (P.T.A.B. May. 9, 2016)

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1005 Exhibit: Ex 1005 Ooshio US4645218

Document IPR2015-01764, No. 1005 Exhibit - Ex 1005 Ooshio US4645218 (P.T.A.B. Aug. 18, 2015)

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1009 Exhibit: Ex 1009 Cecchi CV

Document IPR2015-01764, No. 1009 Exhibit - Ex 1009 Cecchi CV (P.T.A.B. Aug. 18, 2015)

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1017 Exhibit: Ex 1017 Petitioners Demonstrative Exhibits Graphics

Document IPR2015-01764, No. 1017-7 Exhibit - Ex 1017 Petitioners Demonstrative Exhibits Graphics (P.T.A.B. Oct. 6, 2016)

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2003 Exhibit: US 5,939,831 Fong

Document IPR2015-01764, No. 2003 Exhibit - US 5,939,831 Fong (P.T.A.B. Nov. 25, 2015)

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1003 Exhibit: Ex 1003 Matsumura US5151871

Document IPR2015-01764, No. 1003 Exhibit - Ex 1003 Matsumura US5151871 (P.T.A.B. Aug. 18, 2015)

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1012 Exhibit: Ex 1012 Journal of Vacuum Science

Document IPR2015-01764, No. 1012 Exhibit - Ex 1012 Journal of Vacuum Science (P.T.A.B. Aug. 18, 2015)

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1002 Exhibit: Ex 1002 Tegal EP App 903047249

Document IPR2015-01764, No. 1002 Exhibit - Ex 1002 Tegal EP App 903047249 (P.T.A.B. Aug. 18, 2015)

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1014 Exhibit: Ex 1014 Gordnia Declaration

Document IPR2015-01764, No. 1014-2 Exhibit - Ex 1014 Gordnia Declaration (P.T.A.B. May. 17, 2016)

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2006 Exhibit: PTAB Decision IPR 01766

Document IPR2015-01764, No. 2006 Exhibit - PTAB Decision IPR 01766 (P.T.A.B. May. 16, 2016)

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1014 Exhibit: Expunged

Document IPR2015-01764, No. 1014 Exhibit - Expunged (P.T.A.B. May. 9, 2016)

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1011 Exhibit: Ex 1011 Plasma Etching Technology

Document IPR2015-01764, No. 1011 Exhibit - Ex 1011 Plasma Etching Technology (P.T.A.B. Aug. 18, 2015)

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3001 Exhibit: Exhibit 3001

Document IPR2015-01764, No. 3001-9 Exhibit - Exhibit 3001 (P.T.A.B. Dec. 15, 2016)

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