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2158 Exhibit: Exhibit 2158

Document IPR2016-00387, No. 2158-9 Exhibit - Exhibit 2158 (P.T.A.B. Oct. 14, 2016)

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2105 Exhibit: Ex 2105

Document IPR2016-00387, No. 2105 Exhibit - Ex 2105 (P.T.A.B. Apr. 5, 2016)

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1035 Exhibit: 653 App FH 8 27 14 Adv Action

Document IPR2016-00387, No. 1035 Exhibit - 653 App FH 8 27 14 Adv Action (P.T.A.B. Dec. 28, 2015)

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1026 Exhibit: 542 Patent FH 7 30 12 Response

Document IPR2016-00387, No. 1026 Exhibit - 542 Patent FH 7 30 12 Response (P.T.A.B. Dec. 28, 2015)

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1049 Exhibit: Advantages of Dual Frequency PECVD VandeVen

Document IPR2016-00387, No. 1049 Exhibit - Advantages of Dual Frequency PECVD VandeVen (P.T.A.B. Dec. 28, 2015)

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2162 Exhibit: MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES THE B...

Document IPR2016-00387, No. 2162-32 Exhibit - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES THE BASICS Daryl Ann Doane Paul D Franzon eds, 1993 Part 3 (P.T.A.B. Dec. 9, 2016)

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2122 Exhibit: Ex 2122

Document IPR2016-00387, No. 2122 Exhibit - Ex 2122 (P.T.A.B. Apr. 5, 2016)

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1055 Exhibit: Evaluatoin of Cubic Devices Hayashi

Document IPR2016-00387, No. 1055 Exhibit - Evaluatoin of Cubic Devices Hayashi (P.T.A.B. Dec. 28, 2015)

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1028 Exhibit: 466 Patent FH 2 16 09 Response

Document IPR2016-00387, No. 1028 Exhibit - 466 Patent FH 2 16 09 Response (P.T.A.B. Dec. 28, 2015)

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1032 Exhibit: 617 Patent FH 12 13 10 Response

Document IPR2016-00387, No. 1032 Exhibit - 617 Patent FH 12 13 10 Response (P.T.A.B. Dec. 28, 2015)

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1041 Exhibit: USP 3508980 Jackson

Document IPR2016-00387, No. 1041 Exhibit - USP 3508980 Jackson (P.T.A.B. Dec. 28, 2015)

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2135 Exhibit: Ex 2135

Document IPR2016-00387, No. 2135 Exhibit - Ex 2135 (P.T.A.B. Apr. 5, 2016)

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1083 Exhibit: Ex 1083

Document IPR2016-00387, No. 1083-45 Exhibit - Ex 1083 (P.T.A.B. Feb. 6, 2017)

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1040 Exhibit: Processing for the VLSI Era Wolf

Document IPR2016-00387, No. 1040 Exhibit - Processing for the VLSI Era Wolf (P.T.A.B. Dec. 28, 2015)

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1089 Exhibit: Ex 1089

Document IPR2016-00387, No. 1089-51 Exhibit - Ex 1089 (P.T.A.B. Feb. 6, 2017)

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