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Displaying 534-548 of 840 results

1018 Exhibit: Ex 1018 US Patent No 5,174,856 Hwang

Document IPR2017-00282, No. 1018-17 Exhibit - Ex 1018 US Patent No 5,174,856 Hwang (P.T.A.B. Dec. 2, 2016)

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1010 Exhibit: Exhibit 1010

Document IPR2016-01510, No. 1010-10 Exhibit - Exhibit 1010 (P.T.A.B. Jul. 29, 2016)

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1013 Exhibit: Exhibit 1013

Document IPR2016-01510, No. 1013-13 Exhibit - Exhibit 1013 (P.T.A.B. Jul. 29, 2016)

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1014 Exhibit: Ex 1014 IPR2016 00469, Paper 6

Document IPR2017-00282, No. 1014-13 Exhibit - Ex 1014 IPR2016 00469, Paper 6 (P.T.A.B. Dec. 2, 2016)

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1007 Exhibit: Exhibit 1007

Document IPR2016-01510, No. 1007-7 Exhibit - Exhibit 1007 (P.T.A.B. Jul. 29, 2016)

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1004 Exhibit: Exhibit 1004

Document IPR2016-01512, No. 1004-4 Exhibit - Exhibit 1004 (P.T.A.B. Jul. 29, 2016)

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1011 Exhibit: Ex 1011 Fischl, Etching of Tungsten and Tungsten Silicide Films by C...

Document IPR2017-00282, No. 1011-10 Exhibit - Ex 1011 Fischl, Etching of Tungsten and Tungsten Silicide Films by Chlorine Atoms Fischl (P.T.A.B. Dec. 2, 2016)

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1002 Exhibit: Exhibit 1002

Document IPR2016-01510, No. 1002-2 Exhibit - Exhibit 1002 (P.T.A.B. Jul. 29, 2016)

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2001 Exhibit: Flamm Declaration in Support of Response

Document IPR2017-00282, No. 2001-23 Exhibit - Flamm Declaration in Support of Response (P.T.A.B. Sep. 20, 2017)

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2003 Exhibit: Flamm CV

Document IPR2017-00282, No. 2003-32 Exhibit - Flamm CV (P.T.A.B. Mar. 6, 2018)

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1004 Exhibit: Exhibit 1004

Document IPR2016-01510, No. 1004-4 Exhibit - Exhibit 1004 (P.T.A.B. Jul. 29, 2016)

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1007 Exhibit: Ex 1007 EP App 873111934

Document IPR2015-01766, No. 1007 Exhibit - Ex 1007 EP App 873111934 (P.T.A.B. Aug. 18, 2015)

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1004 Exhibit: Ex 1004 US Patent 5,226,056 Kikuchi

Document IPR2017-00282, No. 1004-4 Exhibit - Ex 1004 US Patent 5,226,056 Kikuchi (P.T.A.B. Dec. 2, 2016)

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1008 Exhibit: Ex 1008 Wright, A Closed Loop Temperature Control System for a Lo...

Document IPR2017-00282, No. 1008-7 Exhibit - Ex 1008 Wright, A Closed Loop Temperature Control System for a Low Temperature Etch Chuck Wright (P.T.A.B. Dec. 2, 2016)

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1026 Exhibit: Ex1026 IPR2016 00469, Paper 5

Document IPR2017-00282, No. 1026-27 Exhibit - Ex1026 IPR2016 00469, Paper 5 (P.T.A.B. Dec. 20, 2017)

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