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1313 Exhibit: 1313 Notice of Allowance 6 11 2009

Document IPR2014-00849, No. 1313 Exhibit - 1313 Notice of Allowance 6 11 2009 (P.T.A.B. May. 29, 2014)

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1311 Exhibit: 1311 Office Action 3 27 2008

Document IPR2014-00849, No. 1311 Exhibit - 1311 Office Action 3 27 2008 (P.T.A.B. May. 29, 2014)

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1305 Exhibit: 1305 Kudryavtsev, Ionization Relaxation

Document IPR2014-00849, No. 1305 Exhibit - 1305 Kudryavtsev, Ionization Relaxation (P.T.A.B. May. 29, 2014)

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1302 Exhibit: 1302 Kortshagen Declaration

Document IPR2014-00849, No. 1302 Exhibit - 1302 Kortshagen Declaration (P.T.A.B. May. 29, 2014)

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1304 Exhibit: 1304 Wang USP 6413382

Document IPR2014-00849, No. 1304 Exhibit - 1304 Wang USP 6413382 (P.T.A.B. May. 29, 2014)

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1314 Exhibit: 1314 European Patent Appln 1560943 Response 4 21 2008

Document IPR2014-00849, No. 1314 Exhibit - 1314 European Patent Appln 1560943 Response 4 21 2008 (P.T.A.B. May. 29, 2014)

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1310 Exhibit: 1310 Chistyakov USP 6853142

Document IPR2014-00849, No. 1310 Exhibit - 1310 Chistyakov USP 6853142 (P.T.A.B. May. 29, 2014)

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1205 Exhibit: 1205 Kudryavtsev, Ionization relaxation

Document IPR2014-00846, No. 1205 Exhibit - 1205 Kudryavtsev, Ionization relaxation (P.T.A.B. May. 29, 2014)

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1215 Exhibit: 1215 Claim Chart Mozgrin in view of Kudryavtsev

Document IPR2014-00846, No. 1215 Exhibit - 1215 Claim Chart Mozgrin in view of Kudryavtsev (P.T.A.B. May. 29, 2014)

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1202 Exhibit: 1202 Kortshagen Declaration

Document IPR2014-00846, No. 1202 Exhibit - 1202 Kortshagen Declaration (P.T.A.B. May. 29, 2014)

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1321 Exhibit: 1321 Smith, Thin Film Deposition

Document IPR2014-00849, No. 1321 Exhibit - 1321 Smith, Thin Film Deposition (P.T.A.B. May. 29, 2014)

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1319 Exhibit: 1319 Fu USP 6306265

Document IPR2014-00849, No. 1319 Exhibit - 1319 Fu USP 6306265 (P.T.A.B. May. 29, 2014)

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1326 Exhibit: 1326 Claim Chart Wang in view of Kudryavtsev and Lantsman

Document IPR2014-00849, No. 1326 Exhibit - 1326 Claim Chart Wang in view of Kudryavtsev and Lantsman (P.T.A.B. May. 29, 2014)

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1211 Exhibit: US Patent 7147759 Chistyakov

Document IPR2014-00974, No. 1211 Exhibit - US Patent 7147759 Chistyakov (P.T.A.B. Jun. 18, 2014)

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1123 Exhibit: Ex 1123 Deposition Transcript of Larry D Hartsough PhD for US Paten...

Document IPR2014-01100, No. 1123 Exhibit - Ex 1123 Deposition Transcript of Larry D Hartsough PhD for US Patent No 8,125,155 dated February 12, 2015 (P.T.A.B. Apr. 30, 2015)

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