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1024 Exhibit: 167 Patent FH 4 28 98 Response

Document IPR2016-00387, No. 1024 Exhibit - 167 Patent FH 4 28 98 Response (P.T.A.B. Dec. 28, 2015)

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2104 Exhibit: Ex 2104

Document IPR2016-00387, No. 2104 Exhibit - Ex 2104 (P.T.A.B. Apr. 5, 2016)

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2137 Exhibit: Ex 2137

Document IPR2016-00387, No. 2137 Exhibit - Ex 2137 (P.T.A.B. Apr. 5, 2016)

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1030 Exhibit: 119 Patent FH 9 4 12 Response

Document IPR2016-00387, No. 1030 Exhibit - 119 Patent FH 9 4 12 Response (P.T.A.B. Dec. 28, 2015)

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2168 Exhibit: Prosecution History of US Application 12497,652 Office Action mailed...

Document IPR2016-00387, No. 2168-40 Exhibit - Prosecution History of US Application 12497,652 Office Action mailed on May 20, 2014 (P.T.A.B. Dec. 9, 2016)

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1088 Exhibit: Ex 1088

Document IPR2016-00387, No. 1088-50 Exhibit - Ex 1088 (P.T.A.B. Feb. 6, 2017)

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2163 Exhibit: Silicon dioxide Wikipedia

Document IPR2016-00387, No. 2163-35 Exhibit - Silicon dioxide Wikipedia (P.T.A.B. Dec. 9, 2016)

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1034 Exhibit: 652 App FH 11 20 14 Express Abandonment

Document IPR2016-00387, No. 1034 Exhibit - 652 App FH 11 20 14 Express Abandonment (P.T.A.B. Dec. 28, 2015)

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2168 Exhibit: Exhibit 2168

Document IPR2016-00387, No. 2168-23 Exhibit - Exhibit 2168 (P.T.A.B. Oct. 14, 2016)

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1082 Exhibit: Ex 1082

Document IPR2016-00387, No. 1082-44 Exhibit - Ex 1082 (P.T.A.B. Feb. 6, 2017)

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1036 Exhibit: 653 App FH 11 20 14 Express Abandonment

Document IPR2016-00387, No. 1036 Exhibit - 653 App FH 11 20 14 Express Abandonment (P.T.A.B. Dec. 28, 2015)

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1045 Exhibit: Stress in Thermal SiO2 During Growth EerNisse

Document IPR2016-00387, No. 1045 Exhibit - Stress in Thermal SiO2 During Growth EerNisse (P.T.A.B. Dec. 28, 2015)

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2162 Exhibit: Exhibit 2162 Part 5

Document IPR2016-00387, No. 2162-17 Exhibit - Exhibit 2162 Part 5 (P.T.A.B. Oct. 14, 2016)

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1053 Exhibit: Japans Push into Creative Semiconductor Research Tatsuno

Document IPR2016-00387, No. 1053 Exhibit - Japans Push into Creative Semiconductor Research Tatsuno (P.T.A.B. Dec. 28, 2015)

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2118 Exhibit: Ex 2118

Document IPR2016-00387, No. 2118 Exhibit - Ex 2118 (P.T.A.B. Apr. 5, 2016)

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