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1026 Exhibit: TSMC Exhibit 1026

Document IPR2016-01264, No. 1026-45 Exhibit - TSMC Exhibit 1026 (P.T.A.B. May. 22, 2017)

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1033 Exhibit: TSMC Exhibit 1033

Document IPR2016-01264, No. 1033-52 Exhibit - TSMC Exhibit 1033 (P.T.A.B. May. 22, 2017)

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2003 Exhibit: Exhibit 2003 Definition of amorphous

Document IPR2016-01264, No. 2003-4 Exhibit - Exhibit 2003 Definition of amorphous (P.T.A.B. Oct. 5, 2016)

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2031 Exhibit: Exhibit 2031 English translation of JP H11 67686A

Document IPR2016-01264, No. 2031-32 Exhibit - Exhibit 2031 English translation of JP H11 67686A (P.T.A.B. Mar. 7, 2017)

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2042 Exhibit: Exhibit 2042 Min 1996

Document IPR2016-01264, No. 2042-43 Exhibit - Exhibit 2042 Min 1996 (P.T.A.B. Mar. 7, 2017)

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2011 Exhibit: Exhibit 2011 Declaration of Harlan Rusty Harris, PhD

Document IPR2016-01264, No. 2011-12 Exhibit - Exhibit 2011 Declaration of Harlan Rusty Harris, PhD (P.T.A.B. Mar. 7, 2017)

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2002 Exhibit: Exhibit 2002 Amendment A from File History of USP 6,887,353

Document IPR2016-01264, No. 2002-3 Exhibit - Exhibit 2002 Amendment A from File History of USP 6,887,353 (P.T.A.B. Oct. 5, 2016)

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2046 Exhibit: Exhibit 2046 Declaration of Rumiko Whitehead

Document IPR2016-01264, No. 2046-62 Exhibit - Exhibit 2046 Declaration of Rumiko Whitehead (P.T.A.B. Jun. 21, 2017)

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1039 Exhibit: TSMC Exhibit 1039F

Document IPR2016-01264, No. 1039-70 Exhibit - TSMC Exhibit 1039F (P.T.A.B. Jul. 26, 2017)

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2009 Exhibit: Exhibit 2009 Definition of nitride

Document IPR2016-01264, No. 2009-10 Exhibit - Exhibit 2009 Definition of nitride (P.T.A.B. Mar. 7, 2017)

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2021 Exhibit: Exhibit 2021 English translation of JP H09 64044A

Document IPR2016-01264, No. 2021-22 Exhibit - Exhibit 2021 English translation of JP H09 64044A (P.T.A.B. Mar. 7, 2017)

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1025 Exhibit: TSMC Exhibit 1025

Document IPR2016-01264, No. 1025-44 Exhibit - TSMC Exhibit 1025 (P.T.A.B. May. 22, 2017)

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2005 Exhibit: Exhibit 2005 Definition of amorphous

Document IPR2016-01264, No. 2005-6 Exhibit - Exhibit 2005 Definition of amorphous (P.T.A.B. Jan. 11, 2017)

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2036 Exhibit: Exhibit 2036 Definition of solid solution

Document IPR2016-01264, No. 2036-37 Exhibit - Exhibit 2036 Definition of solid solution (P.T.A.B. Mar. 7, 2017)

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2041 Exhibit: Exhibit 2041 USP 6,139,699 Chiang et al

Document IPR2016-01264, No. 2041-42 Exhibit - Exhibit 2041 USP 6,139,699 Chiang et al (P.T.A.B. Mar. 7, 2017)

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