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1040 Exhibit: TSMC Exhibit 1040

Document IPR2016-01378, No. 1040-54 Exhibit - TSMC Exhibit 1040 (P.T.A.B. Jul. 21, 2017)

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1037 Exhibit: TSMC Exhibit 1037

Document IPR2016-01378, No. 1037-51 Exhibit - TSMC Exhibit 1037 (P.T.A.B. Jul. 21, 2017)

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1038 Exhibit: TSMC Exhibit 1038

Document IPR2016-01378, No. 1038-52 Exhibit - TSMC Exhibit 1038 (P.T.A.B. Jul. 21, 2017)

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2017 Exhibit: Microlithography Science and Technology by James R Sheats and Br...

Document IPR2016-01378, No. 2017-38 Exhibit - Microlithography Science and Technology by James R Sheats and Bruce W Smith 1998 (P.T.A.B. Apr. 14, 2017)

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2018 Exhibit: Microlithography Science and Technology, by Kazuaki Suzuki and Br...

Document IPR2016-01378, No. 2018-39 Exhibit - Microlithography Science and Technology, by Kazuaki Suzuki and Bruce W Smith, CRC Press, 2007 Chapter 12 (P.T.A.B. Apr. 14, 2017)

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2027 Exhibit: Library of Congress Certification of Handbook of VLSI Microlithograp...

Document IPR2016-01378, No. 2027-67 Exhibit - Library of Congress Certification of Handbook of VLSI Microlithography (P.T.A.B. Aug. 23, 2017)

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1049 Exhibit: TSMC Exhibit 1049

Document IPR2016-01378, No. 1049-63 Exhibit - TSMC Exhibit 1049 (P.T.A.B. Jul. 21, 2017)

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1043 Exhibit: TSMC Exhibit 1043

Document IPR2016-01378, No. 1043-57 Exhibit - TSMC Exhibit 1043 (P.T.A.B. Jul. 21, 2017)

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2004 Exhibit: Wiley Electrical and Electronics Engineering Dictionary 2004

Document IPR2017-00924, No. 2004-23 Exhibit - Wiley Electrical and Electronics Engineering Dictionary 2004 (P.T.A.B. May. 25, 2017)

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1015 Exhibit: Exhibit 1015

Document IPR2017-00924, No. 1015-15 Exhibit - Exhibit 1015 (P.T.A.B. Feb. 16, 2017)

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1020 Exhibit: TSMC Exhibit 1020

Document IPR2016-01377, No. 1020-29 Exhibit - TSMC Exhibit 1020 (P.T.A.B. Nov. 17, 2016)

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2004 Exhibit: Wiley Electrical and Electronics Engineering Dictionary 2004

Document IPR2016-01377, No. 2004-24 Exhibit - Wiley Electrical and Electronics Engineering Dictionary 2004 (P.T.A.B. Oct. 20, 2016)

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1016 Exhibit: TSMC Exhibit 1016

Document IPR2016-01377, No. 1016-15 Exhibit - TSMC Exhibit 1016 (P.T.A.B. Jul. 12, 2016)

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1004 Exhibit: TSMC Exhibit 1004

Document IPR2016-01377, No. 1004-3 Exhibit - TSMC Exhibit 1004 (P.T.A.B. Jul. 12, 2016)

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2041 Exhibit: Patent Owners Demonstratives

Document IPR2016-01377, No. 2041-69 Exhibit - Patent Owners Demonstratives (P.T.A.B. Sep. 8, 2017)

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