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1301 Exhibit: 1301 Chistyakov USP 7604716

Document IPR2014-00849, No. 1301 Exhibit - 1301 Chistyakov USP 7604716 (P.T.A.B. May. 29, 2014)

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1327 Exhibit: 1327 Claim Chart Wang in view of Kudryavtsev and Mozgrin

Document IPR2014-00849, No. 1327 Exhibit - 1327 Claim Chart Wang in view of Kudryavtsev and Mozgrin (P.T.A.B. May. 29, 2014)

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1317 Exhibit: 1317 Manos, Plasma Etching

Document IPR2014-00849, No. 1317 Exhibit - 1317 Manos, Plasma Etching (P.T.A.B. May. 29, 2014)

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1325 Exhibit: 1325 Claim Chart Wang in view of Kudryavtsev

Document IPR2014-00849, No. 1325 Exhibit - 1325 Claim Chart Wang in view of Kudryavtsev (P.T.A.B. May. 29, 2014)

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1303 Exhibit: 1303 Mozgrin, High Current Low Pressure

Document IPR2014-00849, No. 1303 Exhibit - 1303 Mozgrin, High Current Low Pressure (P.T.A.B. May. 29, 2014)

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1312 Exhibit: 1312 Response 9 24 2008

Document IPR2014-00849, No. 1312 Exhibit - 1312 Response 9 24 2008 (P.T.A.B. May. 29, 2014)

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1323 Exhibit: 1323 Claim Chart Mozgrin in view of Kudryavtsev and Lantsman

Document IPR2014-00849, No. 1323 Exhibit - 1323 Claim Chart Mozgrin in view of Kudryavtsev and Lantsman (P.T.A.B. May. 29, 2014)

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1309 Exhibit: 1309 Catalogue Entry at the Russian State Library Mozgrin Thesis

Document IPR2014-00849, No. 1309 Exhibit - 1309 Catalogue Entry at the Russian State Library Mozgrin Thesis (P.T.A.B. May. 29, 2014)

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1101 Exhibit: US Patent 7,604,716

Document IPR2014-00973, No. 1101 Exhibit - US Patent 7,604,716 (P.T.A.B. Jun. 18, 2014)

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1115 Exhibit: Smith 1995

Document IPR2014-00973, No. 1115 Exhibit - Smith 1995 (P.T.A.B. Jun. 18, 2014)

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1103 Exhibit: Mozgrin 1995

Document IPR2014-00973, No. 1103 Exhibit - Mozgrin 1995 (P.T.A.B. Jun. 18, 2014)

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1106 Exhibit: USPatent 6,853,142

Document IPR2014-00973, No. 1106 Exhibit - USPatent 6,853,142 (P.T.A.B. Jun. 18, 2014)

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1112 Exhibit: Response 759 Patent dated May 2, 2006

Document IPR2014-00973, No. 1112 Exhibit - Response 759 Patent dated May 2, 2006 (P.T.A.B. Jun. 18, 2014)

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1105 Exhibit: US Patent 6,190,512 Lantsman

Document IPR2014-00973, No. 1105 Exhibit - US Patent 6,190,512 Lantsman (P.T.A.B. Jun. 18, 2014)

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1110 Exhibit: Response of April 21, 2008 in EP1560943

Document IPR2014-00973, No. 1110 Exhibit - Response of April 21, 2008 in EP1560943 (P.T.A.B. Jun. 18, 2014)

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