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1020 Exhibit: Ex 1020 Declaration of Scott Bennett, PhD regarding Exhibit 1014 Pa...

Document IPR2017-00279, No. 1020-19 Exhibit - Ex 1020 Declaration of Scott Bennett, PhD regarding Exhibit 1014 Part One (P.T.A.B. Dec. 2, 2016)

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1016 Exhibit: Ex 1016 IPR2015 01759, Paper 7

Document IPR2017-00279, No. 1016-15 Exhibit - Ex 1016 IPR2015 01759, Paper 7 (P.T.A.B. Dec. 2, 2016)

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1021 Exhibit: Ex 1021 Declaration of Rachel J Watters regarding Exhibit 1015

Document IPR2017-00279, No. 1021-21 Exhibit - Ex 1021 Declaration of Rachel J Watters regarding Exhibit 1015 (P.T.A.B. Dec. 2, 2016)

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1008 Exhibit: Ex 1008 Wright, A Closed Loop Temperature Control System for a Lo...

Document IPR2017-00279, No. 1008-7 Exhibit - Ex 1008 Wright, A Closed Loop Temperature Control System for a Low Temperature Etch Chuck Wright (P.T.A.B. Dec. 2, 2016)

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1007 Exhibit: Ex 1007 US Patent Application No 08567,224 224 application

Document IPR2017-00279, No. 1007-6 Exhibit - Ex 1007 US Patent Application No 08567,224 224 application (P.T.A.B. Dec. 2, 2016)

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1017 Exhibit: Ex 1017 IPR2016 00468, Paper 6

Document IPR2017-00279, No. 1017-16 Exhibit - Ex 1017 IPR2016 00468, Paper 6 (P.T.A.B. Dec. 2, 2016)

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1010 Exhibit: Ex 1010 US Patent 3,863,049 Hinman

Document IPR2017-00279, No. 1010-9 Exhibit - Ex 1010 US Patent 3,863,049 Hinman (P.T.A.B. Dec. 2, 2016)

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1022 Exhibit: Ex 1022 Declaration of Rachel J Watters regarding Exhibit 1008

Document IPR2017-00279, No. 1022-22 Exhibit - Ex 1022 Declaration of Rachel J Watters regarding Exhibit 1008 (P.T.A.B. Dec. 2, 2016)

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1027 Exhibit: Ex1027 IPR2017 00280, Paper 2

Document IPR2017-00279, No. 1027-29 Exhibit - Ex1027 IPR2017 00280, Paper 2 (P.T.A.B. Dec. 20, 2017)

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1028 Exhibit: Ex1028 1006 Bravman Declaration

Document IPR2017-00279, No. 1028-30 Exhibit - Ex1028 1006 Bravman Declaration (P.T.A.B. Dec. 20, 2017)

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1005 Exhibit: Ex 1005 US Patent 6,063,710 Kadomura

Document IPR2017-00279, No. 1005-5 Exhibit - Ex 1005 US Patent 6,063,710 Kadomura (P.T.A.B. Dec. 2, 2016)

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1012 Exhibit: Ex 1012 US Patent No 4,331,485 Gat

Document IPR2017-00279, No. 1012-11 Exhibit - Ex 1012 US Patent No 4,331,485 Gat (P.T.A.B. Dec. 2, 2016)

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1018 Exhibit: Ex 1018 IPR2015 01764, Paper 7

Document IPR2017-00279, No. 1018-17 Exhibit - Ex 1018 IPR2015 01764, Paper 7 (P.T.A.B. Dec. 2, 2016)

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1014 Exhibit: Exhibit 1014

Document IPR2017-01749, No. 1014 Exhibit - Exhibit 1014 (P.T.A.B. Jul. 10, 2017)

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1003 Exhibit: Exhibit 1003

Document IPR2017-01749, No. 1003 Exhibit - Exhibit 1003 (P.T.A.B. Jul. 10, 2017)

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