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1021 Exhibit: Response and RCE 05 02 2006

Document IPR2014-00468, No. 1021 Exhibit - Response and RCE 05 02 2006 (P.T.A.B. Feb. 28, 2014)

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1213 Exhibit: TSMC 1213 Manos, Plasma Etching

Document IPR2014-00848, No. 1213 Exhibit - TSMC 1213 Manos, Plasma Etching (P.T.A.B. May. 29, 2014)

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1014 Exhibit: Notice of Allowance 08 19 2010

Document IPR2014-00468, No. 1014 Exhibit - Notice of Allowance 08 19 2010 (P.T.A.B. Feb. 28, 2014)

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1001 Exhibit: US Patent 7811421

Document IPR2014-00468, No. 1001 Exhibit - US Patent 7811421 (P.T.A.B. Feb. 28, 2014)

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1015 Exhibit: US 7811421 Application as Filed

Document IPR2014-00468, No. 1015 Exhibit - US 7811421 Application as Filed (P.T.A.B. Feb. 28, 2014)

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1109 Exhibit: TSMC 1109 Kawamata USP 5958155

Document IPR2014-00851, No. 1109 Exhibit - TSMC 1109 Kawamata USP 5958155 (P.T.A.B. May. 30, 2014)

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1215 Exhibit: TSMC 1215 Office Action 4 21 2010

Document IPR2014-00848, No. 1215 Exhibit - TSMC 1215 Office Action 4 21 2010 (P.T.A.B. May. 29, 2014)

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1105 Exhibit: TSMC 1105 Lantsman USP 6190512

Document IPR2014-00851, No. 1105 Exhibit - TSMC 1105 Lantsman USP 6190512 (P.T.A.B. May. 30, 2014)

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1115 Exhibit: US Patent 7811421 Application as Filed

Document IPR2014-00473, No. 1115 Exhibit - US Patent 7811421 Application as Filed (P.T.A.B. Mar. 7, 2014)

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1114 Exhibit: TSMC 1114 Notice of Allowance 8 19 2010

Document IPR2014-00851, No. 1114 Exhibit - TSMC 1114 Notice of Allowance 8 19 2010 (P.T.A.B. May. 30, 2014)

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1119 Exhibit: Claim Chart Wang and Kawamata

Document IPR2014-00473, No. 1119 Exhibit - Claim Chart Wang and Kawamata (P.T.A.B. Mar. 7, 2014)

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1005 Exhibit: Lantsman

Document IPR2014-00468, No. 1005 Exhibit - Lantsman (P.T.A.B. Feb. 28, 2014)

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1205 Exhibit: TSMC 1205 Lantsman USP 6190512

Document IPR2014-00848, No. 1205 Exhibit - TSMC 1205 Lantsman USP 6190512 (P.T.A.B. May. 29, 2014)

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1201 Exhibit: TSMC 1201 Chistyakov USP 7811421

Document IPR2014-00848, No. 1201 Exhibit - TSMC 1201 Chistyakov USP 7811421 (P.T.A.B. May. 29, 2014)

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1019 Exhibit: Claim Chart Mozgrin and Lantsman

Document IPR2014-00468, No. 1019 Exhibit - Claim Chart Mozgrin and Lantsman (P.T.A.B. Feb. 28, 2014)

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