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1016 Exhibit: Exhibit 1016 Thornton, Magnetron Sputtering

Document IPR2014-00799, No. 1016 Exhibit - Exhibit 1016 Thornton, Magnetron Sputtering (P.T.A.B. May. 22, 2014)

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1030 Exhibit: Deposition Transcript of Larry D Hartsough PhD for US Patent No 7,808,184 February 11, 2015

Document IPR2014-00799, No. 1030 Exhibit - Deposition Transcript of Larry D Hartsough PhD for US Patent No 7,808,184 February 11, 2015 (P.T.A.B. Mar. 31, 2015)

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2015 Exhibit: Hartsough Declaration

Document IPR2014-00799, No. 2015 Exhibit - Hartsough Declaration (P.T.A.B. Dec. 30, 2014)

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1007 Exhibit: Exhibit 1007 Mozgrin Thesis Original Russian

Document IPR2014-00799, No. 1007 Exhibit - Exhibit 1007 Mozgrin Thesis Original Russian (P.T.A.B. May. 22, 2014)

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1008 Exhibit: Exhibit 1008 Catalogue Entry at the Russian State Library Mozgrin Th...

Document IPR2014-00799, No. 1008 Exhibit - Exhibit 1008 Catalogue Entry at the Russian State Library Mozgrin Thesis (P.T.A.B. May. 22, 2014)

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2021 Exhibit: Eronini

Document IPR2014-00799, No. 2021 Exhibit - Eronini (P.T.A.B. Dec. 30, 2014)

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2011 Exhibit: Weyrick

Document IPR2014-00799, No. 2011 Exhibit - Weyrick (P.T.A.B. Dec. 30, 2014)

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2014 Exhibit: DeVito Deposition of 112024

Document IPR2014-00799, No. 2014 Exhibit - DeVito Deposition of 112024 (P.T.A.B. Dec. 30, 2014)

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2010 Exhibit: Pro Hac Vice

Document IPR2014-00799, No. 2010 Exhibit - Pro Hac Vice (P.T.A.B. Nov. 26, 2014)

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1015 Exhibit: Exhibit 1015 Gudmundsson J T, Evolution of the Electron Energy

Document IPR2014-00799, No. 1015 Exhibit - Exhibit 1015 Gudmundsson J T, Evolution of the Electron Energy (P.T.A.B. May. 22, 2014)

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2020 Exhibit: DeVito Deposition 112114

Document IPR2014-00799, No. 2020 Exhibit - DeVito Deposition 112114 (P.T.A.B. Dec. 30, 2014)

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1022 Exhibit: Exhibit 1022 Claim Chart Mozgrin in view of the Mozgrin Thesis and fu...

Document IPR2014-00799, No. 1022 Exhibit - Exhibit 1022 Claim Chart Mozgrin in view of the Mozgrin Thesis and further in view of Wang (P.T.A.B. May. 22, 2014)

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2023 Exhibit: Patent Owners Demonstrative Exhibits

Document IPR2014-00799, No. 2023 Exhibit - Patent Owners Demonstrative Exhibits (P.T.A.B. May. 25, 2015)

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2006 Exhibit: Exhibit pro hac vice

Document IPR2014-00799, No. 2006 Exhibit - Exhibit pro hac vice (P.T.A.B. Nov. 11, 2014)

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1003 Exhibit: Exhibit 1003 Mozgrin, High Current Low Pressure

Document IPR2014-00799, No. 1003 Exhibit - Exhibit 1003 Mozgrin, High Current Low Pressure (P.T.A.B. May. 22, 2014)

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