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1204 Exhibit: 1204 Wang USP 6413382

Document IPR2014-00846, No. 1204 Exhibit - 1204 Wang USP 6413382 (P.T.A.B. May. 29, 2014)

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1216 Exhibit: 1216 Claim Chart Wang in view of Kudryavtsev

Document IPR2014-00846, No. 1216 Exhibit - 1216 Claim Chart Wang in view of Kudryavtsev (P.T.A.B. May. 29, 2014)

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1212 Exhibit: 1212 Response for RCE 759 Patent 5 2 2006

Document IPR2014-00846, No. 1212 Exhibit - 1212 Response for RCE 759 Patent 5 2 2006 (P.T.A.B. May. 29, 2014)

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1210 Exhibit: 1210 European Patent Appln 1560943 Response 4 21 2008

Document IPR2014-00846, No. 1210 Exhibit - 1210 European Patent Appln 1560943 Response 4 21 2008 (P.T.A.B. May. 29, 2014)

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1214 Exhibit: 1214 Ohring, The Materials Science of Thin Films

Document IPR2014-00846, No. 1214 Exhibit - 1214 Ohring, The Materials Science of Thin Films (P.T.A.B. May. 29, 2014)

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1307 Exhibit: 1307 Mozgrin, High Current Manuscript Certified Translation

Document IPR2014-00849, No. 1307 Exhibit - 1307 Mozgrin, High Current Manuscript Certified Translation (P.T.A.B. May. 29, 2014)

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1308 Exhibit: 1308 Mozgrin Thesis Original Russian

Document IPR2014-00849, No. 1308 Exhibit - 1308 Mozgrin Thesis Original Russian (P.T.A.B. May. 29, 2014)

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1206 Exhibit: 1206 Chistyakov USP 6853142

Document IPR2014-00846, No. 1206 Exhibit - 1206 Chistyakov USP 6853142 (P.T.A.B. May. 29, 2014)

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1213 Exhibit: 1213 Manos, Plasma Etching

Document IPR2014-00846, No. 1213 Exhibit - 1213 Manos, Plasma Etching (P.T.A.B. May. 29, 2014)

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1320 Exhibit: 1320 Ohring, The Materials Science of Thin Films

Document IPR2014-00849, No. 1320 Exhibit - 1320 Ohring, The Materials Science of Thin Films (P.T.A.B. May. 29, 2014)

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1316 Exhibit: 1316 Response for RCE 759 Patent 5 2 2006

Document IPR2014-00849, No. 1316 Exhibit - 1316 Response for RCE 759 Patent 5 2 2006 (P.T.A.B. May. 29, 2014)

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1324 Exhibit: 1324 Claim Chart Mozgrin in view of Kudryavtsev and the Mozgrin Th...

Document IPR2014-00849, No. 1324 Exhibit - 1324 Claim Chart Mozgrin in view of Kudryavtsev and the Mozgrin Thesis (P.T.A.B. May. 29, 2014)

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1306 Exhibit: 1306 Lantsman USP 6190512

Document IPR2014-00849, No. 1306 Exhibit - 1306 Lantsman USP 6190512 (P.T.A.B. May. 29, 2014)

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1322 Exhibit: 1322 Claim Chart Mozgrin in view of Kudryavtsev

Document IPR2014-00849, No. 1322 Exhibit - 1322 Claim Chart Mozgrin in view of Kudryavtsev (P.T.A.B. May. 29, 2014)

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1318 Exhibit: 1318 Raizer, Gas Discharge Physics

Document IPR2014-00849, No. 1318 Exhibit - 1318 Raizer, Gas Discharge Physics (P.T.A.B. May. 29, 2014)

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