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Displaying 459-473 of 562 results

2024 Exhibit: Exhibit 2024 Shigyo et al

Document IPR2016-01246, No. 2024 Exhibit - Exhibit 2024 Shigyo et al (P.T.A.B. Mar. 24, 2017)

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2022 Exhibit: Exhibit 2022 Bryant et al

Document IPR2016-01246, No. 2022 Exhibit - Exhibit 2022 Bryant et al (P.T.A.B. Mar. 24, 2017)

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1058 Exhibit: TSMC Exhibit 1058

Document IPR2016-01246, No. 1058 Exhibit - TSMC Exhibit 1058 (P.T.A.B. Jun. 14, 2017)

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2035 Exhibit: Exhibit 2035 Library of Congress Catalog Record

Document IPR2016-01246, No. 2035 Exhibit - Exhibit 2035 Library of Congress Catalog Record (P.T.A.B. Mar. 24, 2017)

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2004 Exhibit: Exhibit 2004 Photograph of a CMP Tool

Document IPR2016-01246, No. 2004 Exhibit - Exhibit 2004 Photograph of a CMP Tool (P.T.A.B. Oct. 5, 2016)

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2061 Exhibit: Exhibit 2061 US6,281,562 to Segawa et al

Document IPR2016-01246, No. 2061 Exhibit - Exhibit 2061 US6,281,562 to Segawa et al (P.T.A.B. Jul. 12, 2017)

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1042 Exhibit: TSMC Exhibit 1042

Document IPR2016-01246, No. 1042 Exhibit - TSMC Exhibit 1042 (P.T.A.B. Jun. 14, 2017)

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2031 Exhibit: Exhibit 2031 WO 9005377

Document IPR2016-01246, No. 2031 Exhibit - Exhibit 2031 WO 9005377 (P.T.A.B. Mar. 24, 2017)

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1046 Exhibit: TSMC Exhibit 1046

Document IPR2016-01246, No. 1046 Exhibit - TSMC Exhibit 1046 (P.T.A.B. Jun. 14, 2017)

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1037 Exhibit: TSMC Exhibit 1037

Document IPR2016-01246, No. 1037 Exhibit - TSMC Exhibit 1037 (P.T.A.B. Jun. 14, 2017)

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2012 Exhibit: Exhibit 2012 Corrected Declaration of Dr E Fred Schubert, PhD

Document IPR2016-01246, No. 2012 Exhibit - Exhibit 2012 Corrected Declaration of Dr E Fred Schubert, PhD (P.T.A.B. Jun. 8, 2017)

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1028 Exhibit: TSMC Exhibit 1028

Document IPR2016-01246, No. 1028 Exhibit - TSMC Exhibit 1028 (P.T.A.B. Jun. 14, 2017)

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2007 Exhibit: Exhibit 2007 USP 6,952,656

Document IPR2016-01246, No. 2007 Exhibit - Exhibit 2007 USP 6,952,656 (P.T.A.B. Oct. 5, 2016)

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2080 Exhibit: Exhibit 2080 Email to PTAB dated 81417

Document IPR2016-01246, No. 2080 Exhibit - Exhibit 2080 Email to PTAB dated 81417 (P.T.A.B. Feb. 1, 2018)

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2077 Exhibit: Exhibit 2077 Order Granting Joint Motion to Dismiss

Document IPR2016-01246, No. 2077 Exhibit - Exhibit 2077 Order Granting Joint Motion to Dismiss (P.T.A.B. Jul. 17, 2017)

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