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IPR2016-01379, No. 3001-27 Exhibit - Mask, MERRIAM WEBSTERCOM (P.T.A.B. Jan. 18, 2017)
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IPR2016-01379, No. 3001-27 Exhibit - Mask, MERRIAM WEBSTERCOM (P.T.A.B. Jan. 18, 2017)
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IPR2016-01379, No. 2005-24 Exhibit - October 7, 2016 Preliminary Constructions (P.T.A.B. Oct. 20, 2016)
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IPR2016-01379, No. 2005-24 Exhibit - October 7, 2016 Preliminary Constructions (P.T.A.B. Oct. 20, 2016)
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IPR2016-01379, No. 1049-61 Exhibit - TSMC Exhibit 1049 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1049-61 Exhibit - TSMC Exhibit 1049 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1050-62 Exhibit - TSMC Exhibit 1050 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1050-62 Exhibit - TSMC Exhibit 1050 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 2014-33 Exhibit - Influence of reactor wall conditions on etch processes in inductively coupled fluorocarbon plasmas by M Schaepkens, et al (P.T.A.B. Apr. 14, 2017)
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IPR2016-01379, No. 2014-33 Exhibit - Influence of reactor wall conditions on etch processes in inductively coupled fluorocarbon plasmas by M Schaepkens, et al (P.T.A.B. Apr. 14, 2017)
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IPR2016-01379, No. 2019-38 Exhibit - Microlithography Science and Technology, 2nd ed, by Kazuaki Suzuki and Bruce W Smith 2007 Chapter 11 (P.T.A.B. Apr. 14, 2017)
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IPR2016-01379, No. 2019-38 Exhibit - Microlithography Science and Technology, 2nd ed, by Kazuaki Suzuki and Bruce W Smith 2007 Chapter 11 (P.T.A.B. Apr. 14, 2017)
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IPR2016-01379, No. 2002-21 Exhibit - R F Graf, Modern Dictionary of Electronics 6th ed 1984 (P.T.A.B. Oct. 20, 2016)
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IPR2016-01379, No. 2002-21 Exhibit - R F Graf, Modern Dictionary of Electronics 6th ed 1984 (P.T.A.B. Oct. 20, 2016)
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IPR2016-01379, No. 2006-25 Exhibit - Declaration of Seung Woo Hur (P.T.A.B. Oct. 20, 2016)
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IPR2016-01379, No. 2006-25 Exhibit - Declaration of Seung Woo Hur (P.T.A.B. Oct. 20, 2016)
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IPR2016-01379, No. 2015-34 Exhibit - Handbook of VLSI Microlithography, Second Edition, Principles, Technology, and Applications (P.T.A.B. Apr. 14, 2017)
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IPR2016-01379, No. 2015-34 Exhibit - Handbook of VLSI Microlithography, Second Edition, Principles, Technology, and Applications (P.T.A.B. Apr. 14, 2017)
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IPR2016-01379, No. 1016-15 Exhibit - TSMC Exhibit 1016 (P.T.A.B. Jul. 12, 2016)
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IPR2016-01379, No. 1016-15 Exhibit - TSMC Exhibit 1016 (P.T.A.B. Jul. 12, 2016)
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IPR2016-01379, No. 1038-50 Exhibit - TSMC Exhibit 1038 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1038-50 Exhibit - TSMC Exhibit 1038 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1037-49 Exhibit - TSMC Exhibit 1037 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1037-49 Exhibit - TSMC Exhibit 1037 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1003-2 Exhibit - TSMC Exhibit 1003 (P.T.A.B. Jul. 12, 2016)
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IPR2016-01379, No. 1003-2 Exhibit - TSMC Exhibit 1003 (P.T.A.B. Jul. 12, 2016)
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IPR2016-01379, No. 1040-52 Exhibit - TSMC Exhibit 1040 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1040-52 Exhibit - TSMC Exhibit 1040 (P.T.A.B. Jul. 21, 2017)
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IPR2016-01379, No. 1020-26 Exhibit - TSMC Exhibit 1020 (P.T.A.B. Nov. 17, 2016)
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IPR2016-01379, No. 1020-26 Exhibit - TSMC Exhibit 1020 (P.T.A.B. Nov. 17, 2016)
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