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Displaying 444-458 of
492 results
2003 Exhibit: Ex 2003 Kortshagen Deposition 7 2 15
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IPR2014-01088, No. 2003 Exhibit - Ex 2003 Kortshagen Deposition 7 2 15 (P.T.A.B. Jul. 20, 2015)
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1017 Exhibit: Revised Thin Film Deposition Principles and Practice by Smith, DL, M...
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IPR2014-01088, No. 1017-2 Exhibit - Revised Thin Film Deposition Principles and Practice by Smith, DL, McGraw Hill 1995 (P.T.A.B. Jul. 11, 2014)
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1011 Exhibit: Revised G A Hebner, Spatially resolved, excited state densities and n...
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IPR2014-01088, No. 1011-2 Exhibit - Revised G A Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J Appl Physics, 80 5...
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1010 Exhibit: J Hopwood and J Asmussen, Neutral gas temperatures in a multipola...
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IPR2014-01088, No. 1010 Exhibit - J Hopwood and J Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl Phys Let 58 22, 2473 2475 1991 (P.T.A.B. J...
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1005 Exhibit: Revised D W Fahey, et al, High flux beam source of thermal rare gas m...
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IPR2014-01088, No. 1005-2 Exhibit - Revised D W Fahey, et al, High flux beam source of thermal rare gas metastable atoms, J Phys E Sci Insrum, Vol 13, 1980 (P.T.A.B. Jul. 11, 2014)
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1013 Exhibit: Revised Lantsman, US Pat No 6,190,512
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IPR2014-01088, No. 1013-2 Exhibit - Revised Lantsman, US Pat No 6,190,512 (P.T.A.B. Jul. 11, 2014)
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1002 Exhibit: Kortshagen Declaration
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IPR2014-01088, No. 1002 Exhibit - Kortshagen Declaration (P.T.A.B. Jul. 1, 2014)
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1012 Exhibit: US Patent No 7,147,759
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IPR2014-01088, No. 1012 Exhibit - US Patent No 7,147,759 (P.T.A.B. Jul. 1, 2014)
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1007 Exhibit: Iwamura, US Pat No 5,753,886
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IPR2014-01088, No. 1007 Exhibit - Iwamura, US Pat No 5,753,886 (P.T.A.B. Jul. 1, 2014)
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1001 Exhibit: US Patent No 6,806,652
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IPR2014-01088, No. 1001 Exhibit - US Patent No 6,806,652 (P.T.A.B. Jul. 1, 2014)
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1018 Exhibit: List of Related Litigations
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IPR2014-01088, No. 1018 Exhibit - List of Related Litigations (P.T.A.B. Jul. 1, 2014)
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1020 Exhibit: Ex 1020 Supplemental Kortshagen Declaration
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IPR2014-01088, No. 1020 Exhibit - Ex 1020 Supplemental Kortshagen Declaration (P.T.A.B. Jun. 26, 2015)
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1019 Exhibit: Rismiller Declaration ISO Motion for PHV Admission of Brett C Rismill...
Document
IPR2014-01088, No. 1019 Exhibit - Rismiller Declaration ISO Motion for PHV Admission of Brett C Rismiller (P.T.A.B. Nov. 21, 2014)
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1004 Exhibit: US Pat No 6,413,382
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IPR2014-01088, No. 1004 Exhibit - US Pat No 6,413,382 (P.T.A.B. Jul. 1, 2014)
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1014 Exhibit: Revised Clarenbach, Time dependent gas density and temperature m...
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IPR2014-01088, No. 1014-2 Exhibit - Revised Clarenbach, Time dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci Technol 12 2...
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