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1012 Exhibit: Ex 1012 Elements of Physics

Document IPR2015-01759, No. 1012 Exhibit - Ex 1012 Elements of Physics (P.T.A.B. Aug. 18, 2015)

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1015 Exhibit: Ex 1015 Journal of Vacuum Science

Document IPR2015-01759, No. 1015 Exhibit - Ex 1015 Journal of Vacuum Science (P.T.A.B. Aug. 18, 2015)

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1005 Exhibit: Ex 1005 Thomas US4680086

Document IPR2015-01759, No. 1005 Exhibit - Ex 1005 Thomas US4680086 (P.T.A.B. Aug. 18, 2015)

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1008 Exhibit: Ex 1008 Wang US4992391

Document IPR2016-00469, No. 1008 Exhibit - Ex 1008 Wang US4992391 (P.T.A.B. Jan. 15, 2016)

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1001 Exhibit: Ex 1001 USRE40264E1

Document IPR2016-00469, No. 1001 Exhibit - Ex 1001 USRE40264E1 (P.T.A.B. Jan. 15, 2016)

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1009 Exhibit: Ex 1009 Thomas US4680086

Document IPR2016-00469, No. 1009 Exhibit - Ex 1009 Thomas US4680086 (P.T.A.B. Jan. 15, 2016)

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1014 Exhibit: Ex 1014 Cecchi CV

Document IPR2016-00469, No. 1014 Exhibit - Ex 1014 Cecchi CV (P.T.A.B. Jan. 15, 2016)

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2001 Exhibit: PTAB decision denying institution 01759

Document IPR2016-00469, No. 2001 Exhibit - PTAB decision denying institution 01759 (P.T.A.B. Apr. 27, 2016)

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1013 Exhibit: Ex 1013 Cecchi Declaration

Document IPR2016-00469, No. 1013 Exhibit - Ex 1013 Cecchi Declaration (P.T.A.B. Jan. 15, 2016)

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1007 Exhibit: Ex 1007 Narita US4913790

Document IPR2016-00469, No. 1007 Exhibit - Ex 1007 Narita US4913790 (P.T.A.B. Jan. 15, 2016)

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1005 Exhibit: Ex 1005 Fischl

Document IPR2016-00469, No. 1005 Exhibit - Ex 1005 Fischl (P.T.A.B. Jan. 15, 2016)

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1015 Exhibit: Ex 1015 Plasma Etching

Document IPR2016-00469, No. 1015 Exhibit - Ex 1015 Plasma Etching (P.T.A.B. Jan. 15, 2016)

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1011 Exhibit: Ex 1011 CIP 60058650 File History

Document IPR2016-00469, No. 1011 Exhibit - Ex 1011 CIP 60058650 File History (P.T.A.B. Jan. 15, 2016)

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1003 Exhibit: Ex 1003 Wang US 5219485

Document IPR2016-00469, No. 1003 Exhibit - Ex 1003 Wang US 5219485 (P.T.A.B. Jan. 15, 2016)

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1004 Exhibit: Ex 1004 Kawamura US5892207

Document IPR2016-00469, No. 1004 Exhibit - Ex 1004 Kawamura US5892207 (P.T.A.B. Jan. 15, 2016)

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