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1213 Exhibit: Plasma Etching

Document IPR2014-01071, No. 1213 Exhibit - Plasma Etching (P.T.A.B. Jun. 30, 2014)

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1223 Exhibit: Exhibit C08

Document IPR2014-01071, No. 1223 Exhibit - Exhibit C08 (P.T.A.B. Jun. 30, 2014)

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1206 Exhibit: Ionization relaxation in a plasma produced by a pulsed inert gas disch...

Document IPR2014-01071, No. 1206 Exhibit - Ionization relaxation in a plasma produced by a pulsed inert gas discharge (P.T.A.B. Jun. 30, 2014)

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1225 Exhibit: Exhibit C11

Document IPR2014-01071, No. 1225 Exhibit - Exhibit C11 (P.T.A.B. Jun. 30, 2014)

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1208 Exhibit: Foreign article

Document IPR2014-01071, No. 1208 Exhibit - Foreign article (P.T.A.B. Jun. 30, 2014)

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1103 Exhibit: Mozgrin

Document IPR2014-00473, No. 1103 Exhibit - Mozgrin (P.T.A.B. Mar. 7, 2014)

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1115 Exhibit: TSMC 1115 UP Patent 7811421 Application as Filed

Document IPR2014-00851, No. 1115 Exhibit - TSMC 1115 UP Patent 7811421 Application as Filed (P.T.A.B. May. 30, 2014)

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1107 Exhibit: TSMC 1107 Chistyakov USP 7147759

Document IPR2014-00851, No. 1107 Exhibit - TSMC 1107 Chistyakov USP 7147759 (P.T.A.B. May. 30, 2014)

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1105 Exhibit: US Patent 6190512 Lantsman

Document IPR2014-00473, No. 1105 Exhibit - US Patent 6190512 Lantsman (P.T.A.B. Mar. 7, 2014)

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1216 Exhibit: TSMC 1216 Response 6 23 10

Document IPR2014-00848, No. 1216 Exhibit - TSMC 1216 Response 6 23 10 (P.T.A.B. May. 29, 2014)

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1102 Exhibit: Declaration of Kortshagen

Document IPR2014-00473, No. 1102 Exhibit - Declaration of Kortshagen (P.T.A.B. Mar. 7, 2014)

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1221 Exhibit: TSMC 1221 Claim Chart Mozgrin in view of the Mozgrin Thesis

Document IPR2014-00848, No. 1221 Exhibit - TSMC 1221 Claim Chart Mozgrin in view of the Mozgrin Thesis (P.T.A.B. May. 29, 2014)

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1109 Exhibit: US Patent 5958155 Kawamat

Document IPR2014-00473, No. 1109 Exhibit - US Patent 5958155 Kawamat (P.T.A.B. Mar. 7, 2014)

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1113 Exhibit: TSMC 1113 Response 6 23 2010

Document IPR2014-00851, No. 1113 Exhibit - TSMC 1113 Response 6 23 2010 (P.T.A.B. May. 30, 2014)

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1225 Exhibit: TSMC 1225 Claim Chart Wang in view of Mozgrin Thesis

Document IPR2014-00848, No. 1225 Exhibit - TSMC 1225 Claim Chart Wang in view of Mozgrin Thesis (P.T.A.B. May. 29, 2014)

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