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1202 Exhibit: Revised Kortshagen Declaration

Document IPR2014-01089, No. 1202-2 Exhibit - Revised Kortshagen Declaration (P.T.A.B. Jul. 11, 2014)

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1217 Exhibit: Ex 1217 Deposition Transcript of Larry D Hartsough PhD for US Patent No 6,806,652 dated May 15, 2015

Document IPR2014-01089, No. 1217 Exhibit - Ex 1217 Deposition Transcript of Larry D Hartsough PhD for US Patent No 6,806,652 dated May 15, 2015 (P.T.A.B. Jun. 26, 2015)

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1201 Exhibit: Revised US Patent No 6,806,652

Document IPR2014-01089, No. 1201-2 Exhibit - Revised US Patent No 6,806,652 (P.T.A.B. Jul. 11, 2014)

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1211 Exhibit: Revised G A Hebner, Spatially resolved, excited state densities and n...

Document IPR2014-01089, No. 1211-2 Exhibit - Revised G A Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J Appl Physics, 80 5...

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1204 Exhibit: Revised US Patent No 6,413,382

Document IPR2014-01089, No. 1204-2 Exhibit - Revised US Patent No 6,413,382 (P.T.A.B. Jul. 11, 2014)

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1207 Exhibit: US Patent No 7,147,759

Document IPR2014-01089, No. 1207 Exhibit - US Patent No 7,147,759 (P.T.A.B. Jul. 1, 2014)

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1207 Exhibit: Revised US Patent No 7,147,759

Document IPR2014-01089, No. 1207-2 Exhibit - Revised US Patent No 7,147,759 (P.T.A.B. Jul. 11, 2014)

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1208 Exhibit: US Patent No 5,753,886

Document IPR2014-01089, No. 1208 Exhibit - US Patent No 5,753,886 (P.T.A.B. Jul. 1, 2014)

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1105 Exhibit: Fahey 1980

Document IPR2014-00843, No. 1105 Exhibit - Fahey 1980 (P.T.A.B. May. 29, 2014)

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1113 Exhibit: Manos 1989

Document IPR2014-00843, No. 1113 Exhibit - Manos 1989 (P.T.A.B. May. 29, 2014)

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1112 Exhibit: Clarenbach 2003

Document IPR2014-01003, No. 1112 Exhibit - Clarenbach 2003 (P.T.A.B. Jun. 20, 2014)

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1001 Exhibit: US Patent 6,806,652

Document IPR2014-00945, No. 1001 Exhibit - US Patent 6,806,652 (P.T.A.B. Jun. 12, 2014)

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1008 Exhibit: US Patent 3,461,054 Vratny

Document IPR2014-00945, No. 1008 Exhibit - US Patent 3,461,054 Vratny (P.T.A.B. Jun. 12, 2014)

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1006 Exhibit: Kudryavtsev 1983

Document IPR2014-00945, No. 1006 Exhibit - Kudryavtsev 1983 (P.T.A.B. Jun. 12, 2014)

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1002 Exhibit: Kortshagen Declaration

Document IPR2014-00945, No. 1002 Exhibit - Kortshagen Declaration (P.T.A.B. Jun. 12, 2014)

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