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Displaying 369-383 of 516 results

2219 Exhibit: US Pat No 4,908,324

Document IPR2017-01843, No. 2219 Exhibit - US Pat No 4,908,324 (P.T.A.B. Apr. 20, 2018)

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2221 Exhibit: US Pat No 6,020,233

Document IPR2017-01843, No. 2221 Exhibit - US Pat No 6,020,233 (P.T.A.B. Apr. 20, 2018)

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2202 Exhibit: US Patent No 6,437,404 Xiang

Document IPR2017-01843, No. 2202 Exhibit - US Patent No 6,437,404 Xiang (P.T.A.B. Nov. 8, 2017)

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2210 Exhibit: Transcript of the Deposition of Stanley R Shanfield, PhD March 28, 20...

Document IPR2017-01843, No. 2210 Exhibit - Transcript of the Deposition of Stanley R Shanfield, PhD March 28, 2018 (P.T.A.B. Apr. 20, 2018)

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1206 Exhibit: US Patent No 6,110,827 to Chien et al Chien

Document IPR2017-01843, No. 1206 Exhibit - US Patent No 6,110,827 to Chien et al Chien (P.T.A.B. Jul. 26, 2017)

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1214 Exhibit: Kastenmeier et al, Remote plasma etching of silicon nitride and silicon...

Document IPR2017-01843, No. 1214 Exhibit - Kastenmeier et al, Remote plasma etching of silicon nitride and silicon dioxide using NF3O2 gas mixtures, J Vac Sci Technol A 164, JulAug 1998 Kastenmeier ...

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2214 Exhibit: Exhibit 2004 from March 27 28 Deposition of Dr Stanley Shanfield

Document IPR2017-01843, No. 2214 Exhibit - Exhibit 2004 from March 27 28 Deposition of Dr Stanley Shanfield (P.T.A.B. Apr. 20, 2018)

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1220 Exhibit: US Patent No 6,512,266

Document IPR2017-01843, No. 1220 Exhibit - US Patent No 6,512,266 (P.T.A.B. Jul. 26, 2017)

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1221 Exhibit: US Patent No 6,806,584

Document IPR2017-01843, No. 1221 Exhibit - US Patent No 6,806,584 (P.T.A.B. Jul. 26, 2017)

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2232 Exhibit: Transcript of Deposition of Stanley R Shanfield

Document IPR2017-01843, No. 2232 Exhibit - Transcript of Deposition of Stanley R Shanfield (P.T.A.B. Aug. 9, 2018)

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2228 Exhibit: The American Heritage College Dictionary Third Edition

Document IPR2017-01843, No. 2228 Exhibit - The American Heritage College Dictionary Third Edition (P.T.A.B. Apr. 20, 2018)

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2226 Exhibit: Schaepkens, et al, J VAC SCI TECH 26 1999

Document IPR2017-01843, No. 2226 Exhibit - Schaepkens, et al, J VAC SCI TECH 26 1999 (P.T.A.B. Apr. 20, 2018)

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1207 Exhibit: US Patent Publication No 20020145156 to Igarashi et al Igarashi

Document IPR2017-01843, No. 1207 Exhibit - US Patent Publication No 20020145156 to Igarashi et al Igarashi (P.T.A.B. Jul. 26, 2017)

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1219 Exhibit: US Patent No 5,726,479

Document IPR2017-01843, No. 1219 Exhibit - US Patent No 5,726,479 (P.T.A.B. Jul. 26, 2017)

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1218 Exhibit: US Patent No 6,509,234

Document IPR2017-01843, No. 1218 Exhibit - US Patent No 6,509,234 (P.T.A.B. Jul. 26, 2017)

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