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1009 Exhibit: Office Action dated 12 8 2009

Document IPR2014-00995, No. 1009 Exhibit - Office Action dated 12 8 2009 (P.T.A.B. Jun. 20, 2014)

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1010 Exhibit: Response dated 6 3 2010

Document IPR2014-00995, No. 1010 Exhibit - Response dated 6 3 2010 (P.T.A.B. Jun. 20, 2014)

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1018 Exhibit: Leipold

Document IPR2014-00995, No. 1018 Exhibit - Leipold (P.T.A.B. Jun. 20, 2014)

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1002 Exhibit: Declaration of DeVito

Document IPR2014-00995, No. 1002 Exhibit - Declaration of DeVito (P.T.A.B. Jun. 20, 2014)

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1019 Exhibit: Claim Chart Mozgrin and Kudryavtsev

Document IPR2014-00995, No. 1019 Exhibit - Claim Chart Mozgrin and Kudryavtsev (P.T.A.B. Jun. 20, 2014)

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1008 Exhibit: Mozgrin Thesis Catalogue Entry

Document IPR2014-00995, No. 1008 Exhibit - Mozgrin Thesis Catalogue Entry (P.T.A.B. Jun. 20, 2014)

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1016 Exhibit: Thornton

Document IPR2014-00995, No. 1016 Exhibit - Thornton (P.T.A.B. Jun. 20, 2014)

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1004 Exhibit: Kudryavtsev

Document IPR2014-00995, No. 1004 Exhibit - Kudryavtsev (P.T.A.B. Jun. 20, 2014)

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1011 Exhibit: Allowance dated 6282010

Document IPR2014-00995, No. 1011 Exhibit - Allowance dated 6282010 (P.T.A.B. Jun. 20, 2014)

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1016 Exhibit: Ex 1016 Thornton

Document IPR2014-00455, No. 1016 Exhibit - Ex 1016 Thornton (P.T.A.B. Feb. 27, 2014)

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1022 Exhibit: Claim Chart Based on Mozgrin, Mozgrin Thesis and Wang as used in 1...

Document IPR2014-01042, No. 1022 Exhibit - Claim Chart Based on Mozgrin, Mozgrin Thesis and Wang as used in 1 13 cv 11570 RGS (P.T.A.B. Jun. 27, 2014)

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1120 Exhibit: 1120 Claim Chart Mozgrin in view of the Mozgrin Thesis

Document IPR2014-00858, No. 1120 Exhibit - 1120 Claim Chart Mozgrin in view of the Mozgrin Thesis (P.T.A.B. May. 30, 2014)

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1011 Exhibit: File History for US Pat No 7,808,184, Notice of Allowance

Document IPR2014-01042, No. 1011 Exhibit - File History for US Pat No 7,808,184, Notice of Allowance (P.T.A.B. Jun. 27, 2014)

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1012 Exhibit: Plasma Etching An Introduction, by Manos and Flamm, pp 185 258, A...

Document IPR2014-01042, No. 1012 Exhibit - Plasma Etching An Introduction, by Manos and Flamm, pp 185 258, Academic Press 1989 (P.T.A.B. Jun. 27, 2014)

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1106 Exhibit: 1106 Mozgrin, High Current Manuscript Certified Translation

Document IPR2014-00858, No. 1106 Exhibit - 1106 Mozgrin, High Current Manuscript Certified Translation (P.T.A.B. May. 30, 2014)

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