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Displaying 369-383 of
492 results
1009 Exhibit: Repcke et al, Comparison of Optical Emission Spectrometric Measure...
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IPR2014-01088, No. 1009 Exhibit - Repcke et al, Comparison of Optical Emission Spectrometric Measurements of the Concentration and Energy of Species in Low pressure Microwave and Radi...
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1103 Exhibit: Mozgrin 1995
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IPR2014-00843, No. 1103 Exhibit - Mozgrin 1995 (P.T.A.B. May. 29, 2014)
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1209 Exhibit: Repcke 1993
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IPR2014-00923, No. 1209 Exhibit - Repcke 1993 (P.T.A.B. Jun. 10, 2014)
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1206 Exhibit: Kudryavtsev 1983
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IPR2014-00923, No. 1206 Exhibit - Kudryavtsev 1983 (P.T.A.B. Jun. 10, 2014)
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1205 Exhibit: D W Fahey, et al, High flux beam source of thermal rare gas metastab...
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IPR2014-01089, No. 1205 Exhibit - D W Fahey, et al, High flux beam source of thermal rare gas metastable atoms, J Phys E Sci Insrum, Vol 13, 1980 (P.T.A.B. Jul. 1, 2014)
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1105 Exhibit: Fahey 1980
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IPR2014-01003, No. 1105 Exhibit - Fahey 1980 (P.T.A.B. Jun. 20, 2014)
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1110 Exhibit: Hobwood and Asmussen 1991
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IPR2014-00843, No. 1110 Exhibit - Hobwood and Asmussen 1991 (P.T.A.B. May. 29, 2014)
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1108 Exhibit: US Patent 5,753,886
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IPR2014-00843, No. 1108 Exhibit - US Patent 5,753,886 (P.T.A.B. May. 29, 2014)
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1104 Exhibit: US Patent 6,413,382 Wang
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IPR2014-00843, No. 1104 Exhibit - US Patent 6,413,382 Wang (P.T.A.B. May. 29, 2014)
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1203 Exhibit: DV Mozgrin, et al, High Current Low Pressure Quasi Stationary Disch...
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IPR2014-01089, No. 1203 Exhibit - DV Mozgrin, et al, High Current Low Pressure Quasi Stationary Discharge in a Magnetic Field Experimental Research, Plasma Physics Reports, Vol 21, No 5, ...
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1210 Exhibit: Revised J Hopwood and J Asmussen, Neutral gas temperatures in a m...
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IPR2014-01089, No. 1210-2 Exhibit - Revised J Hopwood and J Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl Phys Let 58 22, 2473 2475 1991 (...
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1206 Exhibit: Revised A A Kudryavtsev and VN Skerbov, Ionization relaxation in a p...
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IPR2014-01089, No. 1206-2 Exhibit - Revised A A Kudryavtsev and VN Skerbov, Ionization relaxation in a plasma produced by a pulsed inert gas discharge, Sov Phys Tech Phys 281, pp 30 35, J...
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1212 Exhibit: Revised Clarenbach, Time dependent gas density and temperature m...
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IPR2014-01089, No. 1212-2 Exhibit - Revised Clarenbach, Time dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci Technol 12 2...
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1210 Exhibit: J Hopwood and J Asmussen, Neutral gas temperatures in a multipola...
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IPR2014-01089, No. 1210 Exhibit - J Hopwood and J Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl Phys Let 58 22, 2473 2475 1991 (P.T.A.B. J...
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2003 Exhibit: Kortshagen Deposition
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IPR2014-01089, No. 2003 Exhibit - Kortshagen Deposition (P.T.A.B. Mar. 23, 2015)
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