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IPR2014-01088, No. 1009 Exhibit - Repcke et al, Comparison of Optical Emission Spectrometric Measurements of the Concentration and Energy of Species in Low pressure Microwave and Radiofrequency Plasma
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IPR2014-00923, No. 1206 Exhibit - Kudryavtsev 1983 (P.T.A.B. Jun. 10, 2014)
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IPR2014-01089, No. 1205 Exhibit - D W Fahey, et al, High flux beam source of thermal rare gas metastable atoms, J Phys E Sci Insrum, Vol 13, 1980 (P.T.A.B. Jul. 1, 2014)
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IPR2014-01089, No. 1205 Exhibit - D W Fahey, et al, High flux beam source of thermal rare gas metastable atoms, J Phys E Sci Insrum, Vol 13, 1980 (P.T.A.B. Jul. 1, 2014)
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IPR2014-01003, No. 1105 Exhibit - Fahey 1980 (P.T.A.B. Jun. 20, 2014)
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IPR2014-00843, No. 1104 Exhibit - US Patent 6,413,382 Wang (P.T.A.B. May. 29, 2014)
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IPR2014-01089, No. 1210 Exhibit - J Hopwood and J Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl Phys Let 58 22, 2473 2475 1991 (P.T.A.B. Jul. 1, 2014)
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IPR2014-01089, No. 2003 Exhibit - Kortshagen Deposition (P.T.A.B. Mar. 23, 2015)
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