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2002 Exhibit: Stadheim Declaration in Support of PHV Motion

Document IPR2017-00280, No. 2002-30 Exhibit - Stadheim Declaration in Support of PHV Motion (P.T.A.B. Feb. 14, 2018)

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1008 Exhibit: Ex 1008 Wright, A Closed Loop Temperature Control System for a Lo...

Document IPR2017-00280, No. 1008-7 Exhibit - Ex 1008 Wright, A Closed Loop Temperature Control System for a Low Temperature Etch Chuck Wright (P.T.A.B. Dec. 2, 2016)

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1007 Exhibit: Ex 1007 US Patent Application No 08567,224 224 application

Document IPR2017-00280, No. 1007-6 Exhibit - Ex 1007 US Patent Application No 08567,224 224 application (P.T.A.B. Dec. 2, 2016)

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2001 Exhibit: Flamm Declaration in Support of Response

Document IPR2017-00280, No. 2001-23 Exhibit - Flamm Declaration in Support of Response (P.T.A.B. Sep. 20, 2017)

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1002 Exhibit: Ex 1002 Kadomura US6063710

Document IPR2016-00468, No. 1002 Exhibit - Ex 1002 Kadomura US6063710 (P.T.A.B. Jan. 14, 2016)

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1005 Exhibit: Ex 1005 Mahawili US5059770

Document IPR2016-00468, No. 1005 Exhibit - Ex 1005 Mahawili US5059770 (P.T.A.B. Jan. 14, 2016)

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1006 Exhibit: Ex 1006 Declaration of Dr John Bravman

Document IPR2017-00280, No. 1006-20 Exhibit - Ex 1006 Declaration of Dr John Bravman (P.T.A.B. Dec. 2, 2016)

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1011 Exhibit: Exhibit 1011

Document IPR2017-01749, No. 1011-11 Exhibit - Exhibit 1011 (P.T.A.B. Jul. 10, 2017)

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1009 Exhibit: Exhibit 1009

Document IPR2017-01749, No. 1009-9 Exhibit - Exhibit 1009 (P.T.A.B. Jul. 10, 2017)

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1025 Exhibit: Exhibit 1025

Document IPR2017-01749, No. 1025-24 Exhibit - Exhibit 1025 (P.T.A.B. Jul. 10, 2017)

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1014 Exhibit: Exhibit 1014

Document IPR2017-01749, No. 1014-14 Exhibit - Exhibit 1014 (P.T.A.B. Jul. 10, 2017)

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1018 Exhibit: Exhibit 1018

Document IPR2017-01749, No. 1018-18 Exhibit - Exhibit 1018 (P.T.A.B. Jul. 10, 2017)

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1007 Exhibit: Exhibit 1007

Document IPR2017-01749, No. 1007-7 Exhibit - Exhibit 1007 (P.T.A.B. Jul. 10, 2017)

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1017 Exhibit: Exhibit 1017

Document IPR2017-01749, No. 1017-17 Exhibit - Exhibit 1017 (P.T.A.B. Jul. 10, 2017)

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1002 Exhibit: Exhibit 1002

Document IPR2017-01749, No. 1002-2 Exhibit - Exhibit 1002 (P.T.A.B. Jul. 10, 2017)

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