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IPR2021-01348, No. 1017 Exhibit - Stefani 1999 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1017 Exhibit - Stefani 1999 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1016 Exhibit - Musacchio 1997 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1019 Exhibit - Limanond 1998 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1019 Exhibit - Limanond 1998 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1003 Exhibit - Hatalis, Miltos CV 04 09 21 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1003 Exhibit - Hatalis, Miltos CV 04 09 21 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1020 Exhibit - Ison 1997 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1020 Exhibit - Ison 1997 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1011 Exhibit - Leachman 1996 (P.T.A.B. Aug. 3, 2021)
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IPR2021-01348, No. 1011 Exhibit - Leachman 1996 (P.T.A.B. Aug. 3, 2021)
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IPR2022-01196, No. 1006-5 Exhibit - Bushman, S, et al, Integration of the APC Framework with AMDs Fab25 Factory System, Proc SPIE 3882, Process, Equipment, and Materials Control in Integrated Circuit
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IPR2022-01196, No. 1010-9 Exhibit - Alptekin S E, A suggested model program for CIM education Industrial and Manufacturing Engineering, May 218 1990 Alptekin (P.T.A.B. Jun. 30, 2022)
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IPR2022-01196, No. 1010-9 Exhibit - Alptekin S E, A suggested model program for CIM education Industrial and Manufacturing Engineering, May 218 1990 Alptekin (P.T.A.B. Jun. 30, 2022)
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IPR2022-01196, No. 1009-8 Exhibit - Barna, G, APC in the Semiconductor Industry, History and Near Term Prognosis, IEEESEMI Advanced Semiconductor Manufacturing Conference 1996 Barna (P.T.A.B. Jun. 30,
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IPR2022-01196, No. 1003-12 Exhibit - Declaration of PK Mozumder, PhD (P.T.A.B. Jun. 30, 2022)
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IPR2022-01196, No. 1003-12 Exhibit - Declaration of PK Mozumder, PhD (P.T.A.B. Jun. 30, 2022)
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IPR2022-01196, No. 1007-6 Exhibit - Yelverton, M, et al, Factory Wide Run to Run Process Control, Solid State Technology, Vol 42, No 12, p 45 1999 Yelverton (P.T.A.B. Jun. 30, 2022)
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IPR2022-01196, No. 1007-6 Exhibit - Yelverton, M, et al, Factory Wide Run to Run Process Control, Solid State Technology, Vol 42, No 12, p 45 1999 Yelverton (P.T.A.B. Jun. 30, 2022)
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IPR2022-01196, No. 1002-2 Exhibit - Prosecution History of US Patent No 6,836,691 (P.T.A.B. Jun. 29, 2022)
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IPR2022-01196, No. 1002-2 Exhibit - Prosecution History of US Patent No 6,836,691 (P.T.A.B. Jun. 29, 2022)
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IPR2022-01196, No. 1005-4 Exhibit - Decision Denying Institution of IPR2021 01348 (P.T.A.B. Jun. 30, 2022)
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IPR2022-01196, No. 1005-4 Exhibit - Decision Denying Institution of IPR2021 01348 (P.T.A.B. Jun. 30, 2022)
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