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1202 Exhibit: Kortshagen Declaration

Document IPR2014-00923, No. 1202 Exhibit - Kortshagen Declaration (P.T.A.B. Jun. 10, 2014)

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1111 Exhibit: Hebner 1996

Document IPR2014-00843, No. 1111 Exhibit - Hebner 1996 (P.T.A.B. May. 29, 2014)

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1106 Exhibit: Kudryavtsev 1983

Document IPR2014-01003, No. 1106 Exhibit - Kudryavtsev 1983 (P.T.A.B. Jun. 20, 2014)

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1112 Exhibit: Clarenbach 2003

Document IPR2014-00843, No. 1112 Exhibit - Clarenbach 2003 (P.T.A.B. May. 29, 2014)

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1212 Exhibit: Clarenbach, Time dependent gas density and temperature measurem...

Document IPR2014-01089, No. 1212 Exhibit - Clarenbach, Time dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci Technol 12 2003 345 35...

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1201 Exhibit: US Patent 6,806,652

Document IPR2014-00923, No. 1201 Exhibit - US Patent 6,806,652 (P.T.A.B. Jun. 10, 2014)

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1207 Exhibit: US Patent 7,147,759 Chistyakov

Document IPR2014-00923, No. 1207 Exhibit - US Patent 7,147,759 Chistyakov (P.T.A.B. Jun. 10, 2014)

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1109 Exhibit: Repcke 1993

Document IPR2014-00843, No. 1109 Exhibit - Repcke 1993 (P.T.A.B. May. 29, 2014)

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1009 Exhibit: Repcke 1993

Document IPR2014-00945, No. 1009 Exhibit - Repcke 1993 (P.T.A.B. Jun. 12, 2014)

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1210 Exhibit: Hopwood 1991

Document IPR2014-00923, No. 1210 Exhibit - Hopwood 1991 (P.T.A.B. Jun. 10, 2014)

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1102 Exhibit: Kortshagen Declaration

Document IPR2014-00843, No. 1102 Exhibit - Kortshagen Declaration (P.T.A.B. May. 29, 2014)

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1208 Exhibit: Revised US Patent No 5,753,886

Document IPR2014-01089, No. 1208-2 Exhibit - Revised US Patent No 5,753,886 (P.T.A.B. Jul. 11, 2014)

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1211 Exhibit: G A Hebner, Spatially resolved, excited state densities and neutral an...

Document IPR2014-01089, No. 1211 Exhibit - G A Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J Appl Physics, 80 5, 2624 263...

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1101 Exhibit: US Patent 6,806,652

Document IPR2014-00843, No. 1101 Exhibit - US Patent 6,806,652 (P.T.A.B. May. 29, 2014)

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1110 Exhibit: Hopwood 1991

Document IPR2014-01003, No. 1110 Exhibit - Hopwood 1991 (P.T.A.B. Jun. 20, 2014)

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