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1117 Exhibit: Ex 1117 04 21 08 Response in EP 1560943

Document IPR2014-00456, No. 1117 Exhibit - Ex 1117 04 21 08 Response in EP 1560943 (P.T.A.B. Feb. 27, 2014)

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1121 Exhibit: Claim Chart Based on Wang and Kudryavtsev

Document IPR2014-00996, No. 1121 Exhibit - Claim Chart Based on Wang and Kudryavtsev (P.T.A.B. Jun. 20, 2014)

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1012 Exhibit: 1012 Manos, Plasma Etching

Document IPR2014-00855, No. 1012 Exhibit - 1012 Manos, Plasma Etching (P.T.A.B. May. 30, 2014)

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1013 Exhibit: 1013 Chistyakov USP 7147759

Document IPR2014-00855, No. 1013 Exhibit - 1013 Chistyakov USP 7147759 (P.T.A.B. May. 30, 2014)

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1105 Exhibit: US Pat No 6,413,382

Document IPR2014-01061, No. 1105 Exhibit - US Pat No 6,413,382 (P.T.A.B. Jun. 30, 2014)

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1102 Exhibit: Ex 1102 DeVito Declaration

Document IPR2014-00456, No. 1102 Exhibit - Ex 1102 DeVito Declaration (P.T.A.B. Feb. 27, 2014)

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1101 Exhibit: Ex 1101 184 patent

Document IPR2014-00456, No. 1101 Exhibit - Ex 1101 184 patent (P.T.A.B. Feb. 27, 2014)

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1113 Exhibit: US Patent No 7,147,759

Document IPR2014-00996, No. 1113 Exhibit - US Patent No 7,147,759 (P.T.A.B. Jun. 20, 2014)

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1113 Exhibit: Ex 1113 759 patent

Document IPR2014-00456, No. 1113 Exhibit - Ex 1113 759 patent (P.T.A.B. Feb. 27, 2014)

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1005 Exhibit: 1005 Wang USP 6413382

Document IPR2014-00855, No. 1005 Exhibit - 1005 Wang USP 6413382 (P.T.A.B. May. 30, 2014)

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1117 Exhibit: Response of April 21, 2008 in EP 1560943

Document IPR2014-00996, No. 1117 Exhibit - Response of April 21, 2008 in EP 1560943 (P.T.A.B. Jun. 20, 2014)

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1006 Exhibit: 1006 Mozgrin, High Current Manuscript Certified Translation

Document IPR2014-00855, No. 1006 Exhibit - 1006 Mozgrin, High Current Manuscript Certified Translation (P.T.A.B. May. 30, 2014)

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1010 Exhibit: 1010 Response 6 3 10

Document IPR2014-00855, No. 1010 Exhibit - 1010 Response 6 3 10 (P.T.A.B. May. 30, 2014)

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1008 Exhibit: 1008 Catalogue Entry at the Russian State Library Mozgrin Thesis

Document IPR2014-00855, No. 1008 Exhibit - 1008 Catalogue Entry at the Russian State Library Mozgrin Thesis (P.T.A.B. May. 30, 2014)

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1111 Exhibit: File History for US Pat No 7,808,184, Notice of Allowance

Document IPR2014-01061, No. 1111 Exhibit - File History for US Pat No 7,808,184, Notice of Allowance (P.T.A.B. Jun. 30, 2014)

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