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Displaying 309-323 of
516 results
1024 Exhibit: Deposition Transcript of Alexander D Glew, PhD, June 14, 2018
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IPR2017-01841, No. 1024-45 Exhibit - Deposition Transcript of Alexander D Glew, PhD, June 14, 2018 (P.T.A.B. Jul. 6, 2018)
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1232 Exhibit: Reply Declaration of Stanley R Shanfield, PhD
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IPR2017-01843, No. 1232-61 Exhibit - Reply Declaration of Stanley R Shanfield, PhD (P.T.A.B. Jul. 6, 2018)
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1233 Exhibit: R W Hoffman, Stress Distributions and Thin Film MechanicalPropertie...
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IPR2017-01843, No. 1233-62 Exhibit - R W Hoffman, Stress Distributions and Thin Film MechanicalProperties, 1981 (P.T.A.B. Jul. 6, 2018)
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1023 Exhibit: Declaration of Alexander D Glew, PhD in IPR2016 00386
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IPR2017-01841, No. 1023-44 Exhibit - Declaration of Alexander D Glew, PhD in IPR2016 00386 (P.T.A.B. Jul. 6, 2018)
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1229 Exhibit: A Allan et al, 2001 Technology Roadmap For Semiconductors
Document
IPR2017-01843, No. 1229-58 Exhibit - A Allan et al, 2001 Technology Roadmap For Semiconductors (P.T.A.B. Jul. 6, 2018)
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1022 Exhibit: A Allan et al, 2001 Technology Roadmap For Semiconductors
Document
IPR2017-01841, No. 1022-43 Exhibit - A Allan et al, 2001 Technology Roadmap For Semiconductors (P.T.A.B. Jul. 6, 2018)
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1231 Exhibit: Deposition Transcript of Alexander D Glew, PhD
Document
IPR2017-01843, No. 1231-60 Exhibit - Deposition Transcript of Alexander D Glew, PhD (P.T.A.B. Jul. 6, 2018)
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2024 Exhibit: Sur Reply Declaration of Alexander D Glew
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IPR2017-01841, No. 2024-50 Exhibit - Sur Reply Declaration of Alexander D Glew (P.T.A.B. Jul. 27, 2018)
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2026 Exhibit: Transcript of Deposition of Stanley R Shanfield
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IPR2017-01841, No. 2026-55 Exhibit - Transcript of Deposition of Stanley R Shanfield (P.T.A.B. Aug. 9, 2018)
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2232 Exhibit: Transcript of Deposition of Stanley R Shanfield
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IPR2017-01843, No. 2232-65 Exhibit - Transcript of Deposition of Stanley R Shanfield (P.T.A.B. Aug. 9, 2018)
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2023 Exhibit: Shanfield Deposition Exhibit
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IPR2017-01841, No. 2023-54 Exhibit - Shanfield Deposition Exhibit (P.T.A.B. Aug. 9, 2018)
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1221 Exhibit: US Patent No 6,806,584
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IPR2017-01843, No. 1221-20 Exhibit - US Patent No 6,806,584 (P.T.A.B. Jul. 26, 2017)
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1214 Exhibit: Kastenmeier et al, Remote plasma etching of silicon nitride and silicon...
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IPR2017-01843, No. 1214-13 Exhibit - Kastenmeier et al, Remote plasma etching of silicon nitride and silicon dioxide using NF3O2 gas mixtures, J Vac Sci Technol A 164, JulAug 1998 Kastenme...
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1220 Exhibit: US Patent No 6,512,266
Document
IPR2017-01843, No. 1220-19 Exhibit - US Patent No 6,512,266 (P.T.A.B. Jul. 26, 2017)
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1223 Exhibit: Interaction of Transition Metals with Silicon 100 The Ni Si, Co Si and A...
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IPR2017-01843, No. 1223 Exhibit - Interaction of Transition Metals with Silicon 100 The Ni Si, Co Si and AuSi100 Systems, by Steven Naftel, Graduate Program in Chemistry, The University of We...
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