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1027 Exhibit: Metz

Document IPR2020-01491, No. 1027-18 Exhibit - Metz (P.T.A.B. Aug. 20, 2020)

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1008 Exhibit: Ishida IEDM

Document IPR2020-01491, No. 1008-9 Exhibit - Ishida IEDM (P.T.A.B. Aug. 20, 2020)

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1009 Exhibit: Osada

Document IPR2020-01491, No. 1009-14 Exhibit - Osada (P.T.A.B. Aug. 20, 2020)

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1010 Exhibit: ITC Claim Construction Order

Document IPR2020-01491, No. 1010-10 Exhibit - ITC Claim Construction Order (P.T.A.B. Aug. 20, 2020)

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1007 Exhibit: Ex Parte Reexam History 4 of 4

Document IPR2020-01491, No. 1007-8 Exhibit - Ex Parte Reexam History 4 of 4 (P.T.A.B. Aug. 20, 2020)

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1006 Exhibit: Prosecution History 805 Patent

Document IPR2020-01491, No. 1006-4 Exhibit - Prosecution History 805 Patent (P.T.A.B. Aug. 20, 2020)

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2007 Exhibit: Ex 2007

Document IPR2020-01491, No. 2007-40 Exhibit - Ex 2007 (P.T.A.B. Jun. 1, 2021)

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2011 Exhibit: Ex 2011

Document IPR2020-01491, No. 2011-44 Exhibit - Ex 2011 (P.T.A.B. Jun. 1, 2021)

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2012 Exhibit: Ex 2012 Vol 3 of 3

Document IPR2020-01491, No. 2012-47 Exhibit - Ex 2012 Vol 3 of 3 (P.T.A.B. Jun. 1, 2021)

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2004 Exhibit: Ex 2004

Document IPR2020-01491, No. 2004-29 Exhibit - Ex 2004 (P.T.A.B. Dec. 10, 2020)

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2002 Exhibit: Ex 2002

Document IPR2020-01491, No. 2002-27 Exhibit - Ex 2002 (P.T.A.B. Dec. 10, 2020)

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2005 Exhibit: Ex 2005

Document IPR2020-01491, No. 2005-30 Exhibit - Ex 2005 (P.T.A.B. Dec. 10, 2020)

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2003 Exhibit: Ex 2003

Document IPR2020-01491, No. 2003-28 Exhibit - Ex 2003 (P.T.A.B. Dec. 10, 2020)

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2001 Exhibit: Ex 2001

Document IPR2020-01491, No. 2001-26 Exhibit - Ex 2001 (P.T.A.B. Dec. 10, 2020)

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1038 Exhibit: Bagherzadeh Deposition Transcript

Document IPR2020-01491, No. 1038-54 Exhibit - Bagherzadeh Deposition Transcript (P.T.A.B. Sep. 8, 2021)

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