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1205 Exhibit: Bussiahn

Document IPR2015-01377, No. 1205 Exhibit - Bussiahn (P.T.A.B. Jun. 12, 2015)

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2076 Exhibit: 2076

Document IPR2015-01377, No. 2076 Exhibit - 2076 (P.T.A.B. Mar. 1, 2016)

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2051 Exhibit: 2051

Document IPR2015-01377, No. 2051 Exhibit - 2051 (P.T.A.B. Mar. 1, 2016)

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1216 Exhibit: Beterov

Document IPR2015-01377, No. 1216 Exhibit - Beterov (P.T.A.B. Jun. 12, 2015)

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1201 Exhibit: Pat No 7435982

Document IPR2015-01377, No. 1201 Exhibit - Pat No 7435982 (P.T.A.B. Jun. 12, 2015)

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1211 Exhibit: Second Smith Declaration Public

Document IPR2015-01377, No. 1211 Exhibit - Second Smith Declaration Public (P.T.A.B. Jun. 12, 2015)

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1212 Exhibit: Energetiq Preliminary Injunction Public

Document IPR2015-01377, No. 1212 Exhibit - Energetiq Preliminary Injunction Public (P.T.A.B. Jun. 12, 2015)

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1209 Exhibit: Slifvast

Document IPR2015-01377, No. 1209 Exhibit - Slifvast (P.T.A.B. Jun. 12, 2015)

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2002 Exhibit: 2002

Document IPR2015-01300, No. 2002 Exhibit - 2002 (P.T.A.B. Jan. 13, 2016)

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1108 Exhibit: Energetiq EQ 10M Soft XRay EUV Source Data Sheet

Document IPR2015-01300, No. 1108 Exhibit - Energetiq EQ 10M Soft XRay EUV Source Data Sheet (P.T.A.B. May. 29, 2015)

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1117 Exhibit: Updated Patent Family Chart

Document IPR2015-01300, No. 1117 Exhibit - Updated Patent Family Chart (P.T.A.B. Apr. 5, 2016)

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1118 Exhibit: Summary of IPRs

Document IPR2015-01300, No. 1118 Exhibit - Summary of IPRs (P.T.A.B. Apr. 5, 2016)

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2102 Exhibit: Tarud PHV decl

Document IPR2015-01300, No. 2102 Exhibit - Tarud PHV decl (P.T.A.B. Apr. 4, 2016)

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2016 Exhibit: 2016

Document IPR2015-01300, No. 2016-2 Exhibit - 2016 (P.T.A.B. Mar. 1, 2016)

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2048 Exhibit: 2048

Document IPR2015-01300, No. 2048 Exhibit - 2048 (P.T.A.B. Mar. 1, 2016)

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