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1001 Exhibit: Exhibit 1001

Document IPR2017-01746, No. 1001 Exhibit - Exhibit 1001 (P.T.A.B. Jul. 10, 2017)

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1002 Exhibit: Exhibit 1002

Document IPR2017-01746, No. 1002 Exhibit - Exhibit 1002 (P.T.A.B. Jul. 10, 2017)

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1031 Exhibit: Exhibit 1031

Document IPR2017-01746, No. 1031 Exhibit - Exhibit 1031 (P.T.A.B. Jul. 10, 2017)

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1016 Exhibit: Exhibit 1016

Document IPR2017-01746, No. 1016 Exhibit - Exhibit 1016 (P.T.A.B. Jul. 10, 2017)

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1004 Exhibit: Exhibit 1004

Document IPR2017-01746, No. 1004 Exhibit - Exhibit 1004 (P.T.A.B. Jul. 10, 2017)

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1021 Exhibit: Exhibit 1021

Document IPR2017-01746, No. 1021 Exhibit - Exhibit 1021 (P.T.A.B. Jul. 10, 2017)

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1008 Exhibit: Exhibit 1008

Document IPR2017-01746, No. 1008 Exhibit - Exhibit 1008 (P.T.A.B. Jul. 10, 2017)

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1028 Exhibit: Exhibit 1028

Document IPR2017-01746, No. 1028 Exhibit - Exhibit 1028 (P.T.A.B. Jul. 10, 2017)

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1015 Exhibit: Exhibit 1015

Document IPR2017-01746, No. 1015 Exhibit - Exhibit 1015 (P.T.A.B. Jul. 10, 2017)

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1025 Exhibit: Exhibit 1025

Document IPR2017-01746, No. 1025 Exhibit - Exhibit 1025 (P.T.A.B. Jul. 10, 2017)

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IP03YJUNRXEAPX3

Document PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING, 08/866,040, No. IP03YJUNRXEAPX3 (U.S. Pat. App. Jun. 3, 2016)

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IP03YELCRXEAPX2

Document PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING, 08/866,040, No. IP03YELCRXEAPX2 (U.S. Pat. App. Jun. 3, 2016)

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IOK7FV8RRXEAPX0

Document PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING, 08/866,040, No. IOK7FV8RRXEAPX0 (U.S. Pat. App. May. 23, 2016)

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IOK7F6GARXEAPX5

Document PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING, 08/866,040, No. IOK7F6GARXEAPX5 (U.S. Pat. App. May. 23, 2016)

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IBJMMGU9PXXIFW4

Document PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING, 08/866,040, No. IBJMMGU9PXXIFW4 (U.S. Pat. App. Jun. 30, 2015)

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