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IPR2014-01481, No. 1113 Exhibit - 1113 Response 10 19 2004 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1109 Exhibit - 1109 Kawamata USP 5958155 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1120 Exhibit - 1120 Sellers, Asymmetric Bipolar (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1102 Exhibit - 1102 Mozgrin, High Current Low Pressure (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1112 Exhibit - 1112 CRC Handbook 2001 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1103 Exhibit - 1103 Wang USP 6413382 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1118 Exhibit - 1118 Savvides, Unbalanced magnetron (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1116 Exhibit - 1116 Mozgrin Thesis Russian (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1107 Exhibit - 1107 Fu USP 6306265 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1105 Exhibit - 1105 Declaration of Richard DeVito (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1114 Exhibit - 1114 Catalogue Entry Mozgrin Thesis (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1115 Exhibit - 1115 Mozgrin Thesis translation (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1119 Exhibit - 1119 Grove, Arcing Problems Encountered (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1119 Exhibit - 1119 Grove, Arcing Problems Encountered (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1110 Exhibit - 1110 Low Temp Russian Fortov (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1121 Exhibit - 1121 Rossnagel, Magnetron Sputter deposition (P.T.A.B. Sep. 11, 2014)
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IPR2014-01481, No. 1121 Exhibit - 1121 Rossnagel, Magnetron Sputter deposition (P.T.A.B. Sep. 11, 2014)
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