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1020 Exhibit: TSMC Exhibit 1020

Document IPR2016-01247, No. 1020 Exhibit - TSMC Exhibit 1020 (P.T.A.B. Jun. 24, 2016)

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1012 Exhibit: TSMC Exhibit 1012

Document IPR2016-01247, No. 1012 Exhibit - TSMC Exhibit 1012 (P.T.A.B. Jun. 24, 2016)

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1016 Exhibit: TSMC Exhibit 1016

Document IPR2016-01247, No. 1016 Exhibit - TSMC Exhibit 1016 (P.T.A.B. Jun. 24, 2016)

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1014 Exhibit: TSMC Exhibit 1014

Document IPR2016-01247, No. 1014 Exhibit - TSMC Exhibit 1014 (P.T.A.B. Jun. 24, 2016)

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1005 Exhibit: TSMC Exhibit 1005

Document IPR2016-01247, No. 1005 Exhibit - TSMC Exhibit 1005 (P.T.A.B. Jun. 24, 2016)

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2009 Exhibit: Exhibit 2009 USP 7,074,709

Document IPR2016-01247, No. 2009-11 Exhibit - Exhibit 2009 USP 7,074,709 (P.T.A.B. Oct. 7, 2016)

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1022 Exhibit: TSMC Exhibit 1022

Document IPR2016-01247, No. 1022 Exhibit - TSMC Exhibit 1022 (P.T.A.B. Jun. 24, 2016)

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1017 Exhibit: TSMC Exhibit 1017

Document IPR2016-01247, No. 1017 Exhibit - TSMC Exhibit 1017 (P.T.A.B. Jun. 24, 2016)

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1003 Exhibit: TSMC Exhibit 1003

Document IPR2016-01247, No. 1003 Exhibit - TSMC Exhibit 1003 (P.T.A.B. Jun. 24, 2016)

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1007 Exhibit: TSMC Exhibit 1007

Document IPR2016-01247, No. 1007 Exhibit - TSMC Exhibit 1007 (P.T.A.B. Jun. 24, 2016)

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1013 Exhibit: TSMC Exhibit 1013

Document IPR2016-01247, No. 1013 Exhibit - TSMC Exhibit 1013 (P.T.A.B. Jun. 24, 2016)

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2004 Exhibit: Exhibit 2004 Photograph of a CMP Tool

Document IPR2016-01247, No. 2004-6 Exhibit - Exhibit 2004 Photograph of a CMP Tool (P.T.A.B. Oct. 7, 2016)

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2010 Exhibit: Exhibit 2010 Burckel

Document IPR2016-01247, No. 2010-12 Exhibit - Exhibit 2010 Burckel (P.T.A.B. Oct. 7, 2016)

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1018 Exhibit: TSMC Exhibit 1018

Document IPR2016-01247, No. 1018 Exhibit - TSMC Exhibit 1018 (P.T.A.B. Jun. 24, 2016)

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1001 Exhibit: TSMC Exhibit 1001

Document IPR2016-01247, No. 1001 Exhibit - TSMC Exhibit 1001 (P.T.A.B. Jun. 24, 2016)

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