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IPR2014-01494, No. 1023 Exhibit - 1023 Rossnagel, Magnetron Sputter (P.T.A.B. Sep. 12, 2014)
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IPR2014-01494, No. 1023 Exhibit - 1023 Rossnagel, Magnetron Sputter (P.T.A.B. Sep. 12, 2014)
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IPR2014-01494, No. 1016 Exhibit - 1016 Hauzer USP 5306407 (P.T.A.B. Sep. 12, 2014)
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IPR2014-01494, No. 1016 Exhibit - 1016 Hauzer USP 5306407 (P.T.A.B. Sep. 12, 2014)
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IPR2014-01494, No. 1018 Exhibit - 1018 Gopalraja USP 6277249 (P.T.A.B. Sep. 12, 2014)
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IPR2014-01494, No. 1018 Exhibit - 1018 Gopalraja USP 6277249 (P.T.A.B. Sep. 12, 2014)
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IPR2014-01494, No. 1015 Exhibit - 1015 Holland USP 6319355 (P.T.A.B. Sep. 12, 2014)
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IPR2014-01494, No. 1015 Exhibit - 1015 Holland USP 6319355 (P.T.A.B. Sep. 12, 2014)
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IPR2014-01482, No. 1102 Exhibit - 1102 Mozgrin, High Current Low Pressure (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1102 Exhibit - 1102 Mozgrin, High Current Low Pressure (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1103 Exhibit - 1103 Kudryavtsev, Ionization relaxation (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1103 Exhibit - 1103 Kudryavtsev, Ionization relaxation (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1112 Exhibit - 1112 Thornton, Stress Related (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1112 Exhibit - 1112 Thornton, Stress Related (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1104 Exhibit - 1104 Lantsman USP 6190512 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1104 Exhibit - 1104 Lantsman USP 6190512 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1106 Exhibit - 1106 Mozgrin Thesis Russian (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1106 Exhibit - 1106 Mozgrin Thesis Russian (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1101 Exhibit - 1101 Chistyakov USP 6896775 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1101 Exhibit - 1101 Chistyakov USP 6896775 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1116 Exhibit - 1116 Rossnagel, Magnetron sputter (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1116 Exhibit - 1116 Rossnagel, Magnetron sputter (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1109 Exhibit - 1109 Gopalraja USP 6277249 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1109 Exhibit - 1109 Gopalraja USP 6277249 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1115 Exhibit - 1115 Sellers, Asymmetric bipolar (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1115 Exhibit - 1115 Sellers, Asymmetric bipolar (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1113 Exhibit - 1113 Savvides, Unbalance magnetron (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1113 Exhibit - 1113 Savvides, Unbalance magnetron (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1110 Exhibit - 1110 Bobbio USP 5045166 (P.T.A.B. Sep. 11, 2014)
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IPR2014-01482, No. 1110 Exhibit - 1110 Bobbio USP 5045166 (P.T.A.B. Sep. 11, 2014)
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