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PHYSICAL VAPOR DEPOSITION METHODS AND SYSTEMS TO FORM SEMICONDUCTOR FILMS USING COUNTERBALANCE MAGNETIC FIELD GENERATORS

14/792,597 | U.S. Patent Application

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Location ELECTRONIC
Filed July 6, 2015
Examiner JASON BERMAN
Class 204
Art Group 1756
Patent No. 9,761,441
Case Type Utility - 204/298200
Status Patented Case
Parent 13/840,469 Abandoned
Last Updated: 4 years, 11 months ago
Date # Transaction