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METAL OXYNITRIDE CAPACITOR BARRIER LAYER

10/688,678 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 17, 2003
Examiner BRADLEY SMITH
Class 257
Art Group 2891
Patent No. 7,015,527
Case Type Utility - 257/306000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/997,920 Patented
Parent 09/484,815 Patented
Last Updated: 4 years, 3 months ago
Date # Transaction