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METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY PLASMA

10/65,629 | U.S. Patent Application

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Location ELECTRONIC
Filed Nov. 4, 2002
Examiner WILSON LEE
Class 315
Art Group 2821
Patent No. 6,853,142
Case Type Utility - 315/111410
Status Patented Case
Child PCT/US03/34483 Published
Last Updated: 4 years, 11 months ago
Date # Transaction