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COBALT SILICIDE ETCH PROCESS AND APPARATUS

09/454,814 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 3, 1999
Examiner DUY VU NGUYEN DEO
Class 438
Art Group 1765
Patent No. 6,486,069
Case Type Utility - 438/706000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 09/760,402 Patented
Child PCT/US00/32034 Published
Last Updated: 4 years, 10 months ago
Date # Transaction