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Carnegie Mellon University

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Longchang Ni Maarten P. de Boer Ryan M. Pocratsky

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Development of tantalum (Ta) as a structural material for surface micromachining

63/46,736 | U.S. Patent Application

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Location ELECTRONIC

Filed July 1, 2020

Case Type Provisional

Child PCT/US21/40196 Published

Last Updated: 1 year, 6 months ago

Date	#	Transaction
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Development of tantalum (Ta) as a structural material for surface micromachining

63/46,736 | U.S. Patent Application

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