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MKS Instruments, Inc.

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Martin Blacha Ulrich Alfred Brammer Heinrich Johannes Seiwert Gerhard Joachim Schnaiter

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Pressure-less Ozonized DI-water (DI03) Recirculation Reclaim System

61/724,006 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 8, 2012

Case Type Provisional

Status Provisional Application Expired

Child 13/836,842 Patented

Child PCT/US13/68304 Published

Child 14/710,255 Patented

Child 15/423,267 Patented

Last Updated: 2 years, 11 months ago

Date	#	Transaction
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Pressure-less Ozonized DI-water (DI03) Recirculation Reclaim System

61/724,006 | U.S. Patent Application

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