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System for Evaluating and/or Improving Performance of a CMP Pad Dresser

61/246,816 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 29, 2009

Case Type Provisional

Status Provisional Application Expired

Child 12/850,747 Patented

Child 13/975,229 Abandoned

Child 14/223,726 Patented

Child 15/333,030 Abandoned

Child 13/846,740 Abandoned

Child 13/794,164 Patented

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Last Updated: 3 years, 1 month ago

Date	#	Transaction
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System for Evaluating and/or Improving Performance of a CMP Pad Dresser

61/246,816 | U.S. Patent Application

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