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Inventors

GARY FONG FONG CHANG LONG NGUYEN

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APPLIED MATERIALS, INC.

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METHODS AND APPARATUS FOR PRE-STABILIZED PLASMA GENERATION FOR MICROWAVE CLEAN APPLICATIONS

08/746,658 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Nov. 13, 1996

Examiner JUSTIN P BETTENDORF

Class 315

Art Group 2817

Patent No. 5,939,831

Case Type Utility - 315/111210

Status Patented Case

Last Updated: 4 years, 10 months ago

Date	#	Transaction
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METHODS AND APPARATUS FOR PRE-STABILIZED PLASMA GENERATION FOR MICROWAVE CLEAN APPLICATIONS

08/746,658 | U.S. Patent Application

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