Download Docs
Export

DRY ETCHING OF TRANSPARENT ELECTRODES IN A LOW PRESSURE PLASMA REACTOR

08/672,724 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location FILE REPOSITORY (FRANCONIA)
Filed June 28, 1996
Examiner MICHAEL ADJODHA
Class 156
Art Group 1109
Patent No. 5,667,631
Case Type Utility - 156/999999
Status Patented Case
Child PCT/US97/11337 Published
Last Updated: 4 years, 6 months ago
Date # Transaction