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Inventors

NOBUO ISHII JIRO HATA CHISHIO KOSHIMIZU YOSHIFUMI TAHARA HIROSHI NISHIKAWA ISSEI IMAHASHI

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TOKYO ELECTRON LIMITED

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PLASMA PROCESSING APPARATUS

08/327,798 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Oct. 20, 1994

Examiner THI D DANG

Class 156

Art Group 1109

Patent No. 5,571,366

Case Type Utility - 156/345000

Status Patented Case

Child 5-284206

Child 5-284208

Child 5-284209

Child 5-284210

Child 5-338764

Child 6-023992

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Last Updated: 4 years, 3 months ago

Date	#	Transaction
Entries matching. Show All.

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What is PACER?

PACER is a government system to access US court records.

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Docket Alarm uses PACER to access Federal Court documents. Under the flat-rate plan, we pass these fees on to your account without markup.

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If we already have the document in our database, you will not be charged anything. However, if we do not, then we must retrieve it from the court and incur their access fee.

PACER charges $0.10 per page with a 30 page (or $3.00) cap for all documents, except transcripts which have no cap. For example, a five page document is $0.50 and a 50 page document is $3.00. Accessing docket sheets also incurs a fee if we do not already have the full docket sheet (again, max of $3.00). These fees are only incurred for Federal Courts and Bankruptcies.

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PLASMA PROCESSING APPARATUS

08/327,798 | U.S. Patent Application

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