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Inventors

MASAYUKI KOJIMA YOSHIKAZU ITO KAZUSHI TOMITA SHIGEKI TOZAWA SHUNICHI IIMURO MASASHI ARASAWA EIICHI NISHIMURA

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TOKYO ELECTRON LIMITED

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HITACHI, LTD., Assignor HITACHI, LTD., Assignor HITACHI, LTD., Assignor

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ANISOTROPIC ETCHING METHOD AND APPARATUS

08/154,566 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Nov. 19, 1993

Examiner GEORGE A GOUDREAU

Class 156

Art Group 1109

Patent No. 5,445,709

Case Type Utility - 156/643000

Status Patented Case

Child 08/473,777 Abandoned

Child 08/623,737 Patented

Child 4-310279

Last Updated: 5 years ago

Date	#	Transaction
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ANISOTROPIC ETCHING METHOD AND APPARATUS

08/154,566 | U.S. Patent Application

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