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METHOD OF VAPOR-GROWING SEMICONDUCTOR CRYSTAL AND APPARATUS FOR VAPOR- GROWING THE SAME

07/780,469 | U.S. Patent Application

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Filed Oct. 22, 1991
Case Type Utility - 156/610000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Last Updated: 5 years, 1 month ago
Date # Transaction