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TSUNEHIKO TSUBONE NAOYUKI TAMURA SHIGEKAZU KATO KOUJI NISHIHATA ATSUSHI ITOU

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HITACHI, LTD.

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WAFER COOLING METHOD AND APPARATUS

07/724,801 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed July 2, 1991

Examiner RAMAMOHAN RAO PALADUGU

Class 999

Art Group 1107

Patent No. 5,320,982

Case Type Utility - 999/228000

Status Patented Case

Child 08/246,300 Patented

Child 08/460,600 Patented

Child 02-172757

Last Updated: 5 years ago

Date	#	Transaction
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WAFER COOLING METHOD AND APPARATUS

07/724,801 | U.S. Patent Application

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