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Process for Chemical Vapor Deposition of Main Group Metal Nitrides

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PROCESS FOR CHEMICAL VAPOR DEPOSITION OF MAIN GROUP METAL NITRIDES

07/790,576 | U.S. Patent Application

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Filed Nov. 8, 1991

Case Type Utility - 427/255200

Status Patented Case

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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PROCESS FOR CHEMICAL VAPOR DEPOSITION OF MAIN GROUP METAL NITRIDES

07/790,576 | U.S. Patent Application

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