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STEPHEN M. BOBBIO

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MCNC, 3021 CORNWALLIS DRIVE, RESEARCH TRIANGLE PARK, NC A CORP. OF NC

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APPARATUS AND METHOD FOR CONTROLLING PROCESSING UNIFORMITY IN A MAGNETRON

07/656,790 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Feb. 15, 1991

Examiner AARON WEISSTUCH

Class 204

Art Group 1109

Patent No. 5,147,520

Case Type Utility - 204/192330

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 5 years ago

Date	#	Transaction
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APPARATUS AND METHOD FOR CONTROLLING PROCESSING UNIFORMITY IN A MAGNETRON

07/656,790 | U.S. Patent Application

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